Invention Grant
- Patent Title: Spin coating apparatus and method
- Patent Title (中): 旋涂装置及方法
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Application No.: US14017944Application Date: 2013-09-04
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Publication No.: US09278373B2Publication Date: 2016-03-08
- Inventor: Keisuke Nakazawa
- Applicant: KABUSHIKI KAISHA TOSHIBA
- Applicant Address: JP Tokyo
- Assignee: Kabushiki Kaisha Toshiba
- Current Assignee: Kabushiki Kaisha Toshiba
- Current Assignee Address: JP Tokyo
- Agency: Finnegan, Henderson, Farabow, Garrett & Dunner, L.L.P.
- Priority: JP2012-197503 20120907
- Main IPC: B05D3/12
- IPC: B05D3/12 ; B05D1/00 ; B05C11/08 ; H01L21/67 ; G03F7/16

Abstract:
In one embodiment, a spin coating apparatus includes a coating liquid feeding module to drop a coating liquid onto a substrate, and a motor to rotate the substrate. The module drops a first drop amount of the coating liquid onto the substrate at a first discharge rate, while the motor rotates the substrate at a first number of rotations. The module drops a second drop amount of the coating liquid onto the substrate at a second discharge rate larger than the first discharge rate, while the motor rotates the substrate at a second number of rotations smaller than the first number of rotations, after the first drop amount of the coating liquid is dropped. The module discharges the coating liquid onto the substrate at a third discharge rate smaller than the second discharge rate, after the coating liquid is discharged onto the substrate at the second discharge rate.
Public/Granted literature
- US20140072709A1 SPIN COATING APPARATUS AND METHOD Public/Granted day:2014-03-13
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