Invention Grant
US09291444B2 Light reflection mechanism, optical interferometer and spectrometric analyzer 有权
光反射机构,光学干涉仪和光谱分析仪

Light reflection mechanism, optical interferometer and spectrometric analyzer
Abstract:
Provided is an inexpensive, high performance, compact, and energy saving light reflection mechanism comprising a first moving portion having a reflecting surface on the front surface, a supporting portion which supports the first moving portion, a first beam and a translating beam which couple the first moving portion and the supporting portion in the form of cantilever beam above and below the supporting portion, and a drive portion which moves the first moving portion, wherein a large amplitude can be obtained by small energy when the first moving portion is forced into resonance vibration in the direction perpendicular to the first reflecting surface. Also provided is an optical interferometer and a spectral analyzer.
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