Invention Grant
US09305764B2 Plasma light source, inspection apparatus including plasma light source, and method of generating plasma light 有权
等离子体光源,包括等离子体光源的检查装置和产生等离子体光的方法

Plasma light source, inspection apparatus including plasma light source, and method of generating plasma light
Abstract:
A plasma light source includes a chamber having an ionizable medium therein, an ignition source configured to provide first electromagnetic radiation to the chamber, a sustaining source configured to separately provide second electromagnetic radiation to the chamber, a first curved mirror positioned adjacent the chamber, and a second curved mirror positioned opposite the first mirror and arranged to direct the first electromagnetic radiation toward the chamber. The second electromagnetic radiation may be different than the first electromagnetic radiation. Related devices and methods of operation are also discussed.
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