Invention Grant
- Patent Title: System and method for position control of a mechanical piston in a pump
- Patent Title (中): 泵中机械活塞的位置控制系统和方法
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Application No.: US14152866Application Date: 2014-01-10
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Publication No.: US09309872B2Publication Date: 2016-04-12
- Inventor: George Gonnella , James Cedrone , Iraj Gashgaee
- Applicant: Entegris, Inc.
- Applicant Address: US MA Billerica
- Assignee: Entegris, Inc.
- Current Assignee: Entegris, Inc.
- Current Assignee Address: US MA Billerica
- Agency: Sprinkle IP Law Group
- Main IPC: F04B13/00
- IPC: F04B13/00 ; F04B17/03 ; F04B25/00 ; F04B49/06

Abstract:
Embodiments of the systems and methods disclosed herein utilize a brushless DC motor (BLDCM) to drive a single-stage or a multi-stage pump in a pumping system for real time, smooth motion, and extremely precise and repeatable position control over fluid movements and dispense amounts, useful in semiconductor manufacturing. The BLDCM may employ a position sensor for real time position feedback to a processor executing a custom field-oriented control scheme. Embodiments of the invention can reduce heat generation without undesirably compromising the precise position control of the dispense pump by increasing and decreasing, via a custom control scheme, the operating frequency of the BLDCM according to the criticality of the underlying function(s). The control scheme can run the BLDCM at very low speeds while maintaining a constant velocity, which enables the pumping system to operate in a wide range of speeds with minimal variation, substantially increasing dispense performance and operation capabilities.
Public/Granted literature
- US20140127034A1 SYSTEM AND METHOD FOR POSITION CONTROL OF A MECHANICAL PISTON IN A PUMP Public/Granted day:2014-05-08
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