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    OBLONG DIAPHRAGM VALVES
    1.
    发明申请
    OBLONG DIAPHRAGM VALVES 审中-公开

    公开(公告)号：US20180299017A1

    公开(公告)日：2018-10-18

    申请号：US15737963

    申请日：2016-06-22

    Applicant: ENTEGRIS, INC.

    Inventor： Iraj Gashgaee

    IPC: F16K7/17

    CPC classification number: F16K7/17 ,  F04B7/0076 ,  F04B7/02 ,  F04B7/0208 ,  F04B13/00 ,  F04B43/0036 ,  F04B43/04

    Abstract: An oblong diaphragm valve has curved surfaces carved into faces of a body and a plate. The curved surfaces have an oblong shape and define an oval or egg-shaped valve chamber when the body and the plate are joined and secured to each other, with a diaphragm sandwiched there-between. An inlet and an outlet are defined in the curved surface of the body at opposite ends defined by a length of the valve chamber. A flow passage is defined in the curved surface of the plate and has an opening centrally located relative to the valve chamber for actuation of the diaphragm to close or open the oblong diaphragm valve with minimal or no stress, ensuring durability and longevity of the oblong diaphragm valve with increased precision, while reducing fluid waste and pressure spikes in pumping operations.

    System and method for position control of a mechanical piston in a pump
    4.
    发明授权
    System and method for position control of a mechanical piston in a pump 有权
    泵中机械活塞的位置控制系统和方法

    公开(公告)号：US09309872B2

    公开(公告)日：2016-04-12

    申请号：US14152866

    申请日：2014-01-10

    Applicant: Entegris, Inc.

    Inventor： George Gonnella ,  James Cedrone ,  Iraj Gashgaee

    IPC: F04B13/00 ,  F04B17/03 ,  F04B25/00 ,  F04B49/06

    CPC classification number: F04B17/03 ,  F04B25/00 ,  F04B49/065 ,  Y10S417/90

    Abstract: Embodiments of the systems and methods disclosed herein utilize a brushless DC motor (BLDCM) to drive a single-stage or a multi-stage pump in a pumping system for real time, smooth motion, and extremely precise and repeatable position control over fluid movements and dispense amounts, useful in semiconductor manufacturing. The BLDCM may employ a position sensor for real time position feedback to a processor executing a custom field-oriented control scheme. Embodiments of the invention can reduce heat generation without undesirably compromising the precise position control of the dispense pump by increasing and decreasing, via a custom control scheme, the operating frequency of the BLDCM according to the criticality of the underlying function(s). The control scheme can run the BLDCM at very low speeds while maintaining a constant velocity, which enables the pumping system to operate in a wide range of speeds with minimal variation, substantially increasing dispense performance and operation capabilities.

    Abstract translation: 本文公开的系统和方法的实施例利用无刷直流电动机（BLDCM）来驱动泵送系统中的单级或多级泵，以实时，平稳地运动，以及对流体运动进行非常精确和可重复的位置控制， 分配量，用于半导体制造。 BLDCM可以使用位置传感器来实现位置反馈到执行定制的面向场的控制方案的处理器。 本发明的实施例可以通过根据底层功能的关键性，通过自定义控制方案增加和减少BLDCM的工作频率，而不会不期望地损害分配泵的精确位置控制而不发生损害。 该控制方案可以以非常低的速度运行BLDCM，同时保持恒定的速度，这使得泵送系统能够以较小的变化，大幅度增加的分配性能和操作能力在宽范围的速度下运行。

    Diaphragm valve with total valve cavity evacuation
    5.
    发明授权
    Diaphragm valve with total valve cavity evacuation 有权

    公开(公告)号：US10648587B2

    公开(公告)日：2020-05-12

    申请号：US16079709

    申请日：2017-03-31

    Applicant: ENTEGRIS, Inc.

    Inventor： Iraj Gashgaee ,  George Gonnella ,  Bruce Garber

    IPC: F16K31/126 ,  F16K31/122 ,  F16K7/17 ,  F16K47/00

    Abstract: A fluid valve incorporates a plunger with a fluid channel. The plunger is connected to a boss coupled to a diaphragm, this boss also includes a fluid channel and the plunger and boss fluid channels are in fluid communication. The boss fluid channel opens to the backside of the diaphragm in the valve cavity and permits substantially complete pressurization or evacuation of the volume behind the diaphragm in the valve. The substantially complete pressurization of the volume behind the diaphragm enables full closure of the diaphragm and improves contact of the diaphragm with the valve seat thereby improving performance of the valve.

    METHOD AND SYSTEM FOR HIGH VISCOSITY PUMP
    7.
    发明申请
    METHOD AND SYSTEM FOR HIGH VISCOSITY PUMP 审中-公开
    高粘度泵的方法和系统

    公开(公告)号：US20140231318A1

    公开(公告)日：2014-08-21

    申请号：US14265043

    申请日：2014-04-29

    Applicant: Entegris, Inc.

    Inventor： James Cedrone ,  George Gonnella ,  Iraj Gashgaee ,  Ralph J. Stankowski

    IPC: B01D35/30

    CPC classification number: B01D35/30 ,  B01D24/38 ,  B01D24/383 ,  B01D24/42 ,  B01D24/4876 ,  B01D29/39 ,  B01D29/43 ,  B01D35/02 ,  B01D39/2075 ,  F04B15/02 ,  F04B25/00 ,  F04B25/005 ,  F04B39/16 ,  F04B49/065 ,  F04B53/20 ,  F04B2205/14 ,  Y10T137/87885

    Abstract: Embodiments described herein provide systems and methods for high viscosity pumps including a noncompliant filter. One embodiment can include a multi-stage pump comprising an pump inlet flow path, a pump outlet flow path, a feed stage in fluid communication with the pump inlet flow path, a dispense stage in fluid communication with the feed stage and the pump outlet flow path, a noncompliant disposable filter for high viscosity fluid in a flow path between the feed stage and the dispense stage and a set of valves to selectively allow fluid flow through the multi-stage pump.

    Abstract translation: 本文描述的实施例提供了包括不合格过滤器的高粘度泵的系统和方法。 一个实施例可以包括多级泵，其包括泵入口流动路径，泵出口流动路径，与泵入口流动路径流体连通的进料级，与进料级流体连通的分配级和泵出口流 路径，用于进料级和分配级之间的流动路径中的高粘度流体的不合规的一次性过滤器和一组选择性地允许流体流过多级泵的阀。

    SYSTEM AND METHOD FOR POSITION CONTROL OF A MECHANICAL PISTON IN A PUMP
    8.
    发明申请
    SYSTEM AND METHOD FOR POSITION CONTROL OF A MECHANICAL PISTON IN A PUMP 有权
    泵中机械活塞位置控制的系统与方法

    公开(公告)号：US20140127034A1

    公开(公告)日：2014-05-08

    申请号：US14152866

    申请日：2014-01-10

    Applicant: Entegris, Inc.

    Inventor： George Gonnella ,  James Cedrone ,  Iraj Gashgaee

    IPC: F04B49/06 ,  F04B17/03

    CPC classification number: F04B17/03 ,  F04B25/00 ,  F04B49/065 ,  Y10S417/90

    Abstract: Embodiments of the systems and methods disclosed herein utilize a brushless DC motor (BLDCM) to drive a single-stage or a multi-stage pump in a pumping system for real time, smooth motion, and extremely precise and repeatable position control over fluid movements and dispense amounts, useful in semiconductor manufacturing. The BLDCM may employ a position sensor for real time position feedback to a processor executing a custom field-oriented control scheme. Embodiments of the invention can reduce heat generation without undesirably compromising the precise position control of the dispense pump by increasing and decreasing, via a custom control scheme, the operating frequency of the BLDCM according to the criticality of the underlying function(s). The control scheme can run the BLDCM at very low speeds while maintaining a constant velocity, which enables the pumping system to operate in a wide range of speeds with minimal variation, substantially increasing dispense performance and operation capabilities.

    Abstract translation: 本文公开的系统和方法的实施例利用无刷直流电动机（BLDCM）来驱动泵送系统中的单级或多级泵，以实时，平稳地运动，以及对流体运动进行非常精确和可重复的位置控制， 分配量，用于半导体制造。 BLDCM可以使用位置传感器来实现位置反馈到执行定制的面向场的控制方案的处理器。 本发明的实施例可以通过根据底层功能的关键性，通过自定义控制方案增加和减少BLDCM的工作频率，而不会不期望地损害分配泵的精确位置控制而不发生损害。 该控制方案可以以非常低的速度运行BLDCM，同时保持恒定的速度，这使得泵送系统能够以较小的变化，大幅度增加的分配性能和操作能力在宽范围的速度下运行。

    Oblong diaphragm valves
    9.
    发明授权
    Oblong diaphragm valves 有权

    公开(公告)号：US10344876B2

    公开(公告)日：2019-07-09

    申请号：US15737963

    申请日：2016-06-22

    Applicant: Entegris, Inc.

    Inventor： Iraj Gashgaee

    IPC: F16K7/17 ,  F04B7/00 ,  F04B7/02 ,  F04B13/00 ,  F04B43/04 ,  F04B43/00

    Abstract: An oblong diaphragm valve has curved surfaces carved into faces of a body and a plate. The curved surfaces have an oblong shape and define an oval or egg-shaped valve chamber when the body and the plate are joined and secured to each other, with a diaphragm sandwiched there-between. An inlet and an outlet are defined in the curved surface of the body at opposite ends defined by a length of the valve chamber. A flow passage is defined in the curved surface of the plate and has an opening centrally located relative to the valve chamber for actuation of the diaphragm to close or open the oblong diaphragm valve with minimal or no stress, ensuring durability and longevity of the oblong diaphragm valve with increased precision, while reducing fluid waste and pressure spikes in pumping operations.

    System and method for variable dispense position
    10.
    发明授权
    System and method for variable dispense position 有权

    公开(公告)号：US09617988B2

    公开(公告)日：2017-04-11

    申请号：US14466115

    申请日：2014-08-22

    Applicant: Entegris, Inc.

    Inventor： Marc Laverdiere ,  James Cedrone ,  George Gonnella ,  Iraj Gashgaee ,  Paul Magoon ,  Timothy J. King

    IPC: F04B43/02 ,  F04B13/00 ,  F04B49/06

    CPC classification number: F04B43/02 ,  F04B13/00 ,  F04B49/065 ,  F04B2201/0201 ,  F04B2205/09

    Abstract: Embodiments of the invention provide a system, method and computer program product for reducing the hold-up volume of a pump. More particularly, embodiments of the invention can determine, prior to dispensing a fluid, a position for a diaphragm in a chamber to reduce a hold-up volume at a dispense pump and/or a feed pump. This variable home position of the diaphragm can be determined based on a set of factors affecting a dispense operation. Example factors may include a dispense volume and an error volume. The home position for the diaphragm can be selected such that the volume of the chamber at the dispense pump and/or feed pump contains sufficient fluid to perform the various steps of a dispense cycle while minimizing the hold-up volume. Additionally, the home position of the diaphragm can be selected to optimize the effective range of positive displacement.

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