Invention Grant
- Patent Title: Replication of patterned thin-film structures for use in plasmonics and metamaterials
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Application No.: US14578873Application Date: 2014-12-22
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Publication No.: US09356238B2Publication Date: 2016-05-31
- Inventor: David J. Norris , Sang Eon Han , Prashant Nagpal , Aditya Bhan , Nathan Charles Lindquist , Sang-Huyn Oh
- Applicant: Regents of the University of Minnesota
- Applicant Address: US MN St. Paul
- Assignee: Regents of the University of Minnesota
- Current Assignee: Regents of the University of Minnesota
- Current Assignee Address: US MN St. Paul
- Agency: Kagan Binder, PLLC
- Main IPC: B05D3/10
- IPC: B05D3/10 ; B05D7/00 ; H01L49/00 ; B81C99/00 ; B82Y10/00 ; B82Y40/00 ; G02B1/00 ; G02B5/00 ; B81C1/00 ; H01L49/02 ; G02B6/122 ; G03F7/00 ; H01L31/0232 ; H01L31/054
Abstract:
The present invention provides templating methods for replicating patterned metal films from a template substrate such as for use in plasmonic devices and metamaterials. Advantageously, the template substrate is reusable and can provide plural copies of the structure of the template substrate. Because high-quality substrates that are inherently smooth and flat are available, patterned metal films in accordance with the present invention can advantageously provide surfaces that replicate the surface characteristics of the template substrate both in the patterned regions and in the unpatterned regions.
Public/Granted literature
- US20150179938A1 REPLICATION OF PATTERNED THIN-FILM STRUCTURES FOR USE IN PLASMONICS AND METAMATERIALS Public/Granted day:2015-06-25
Information query
