Invention Grant
- Patent Title: CMOS device with improved accuracy of threshold voltage adjustment and method for manufacturing the same
- Patent Title (中): 具有提高阈值电压调整精度的CMOS器件及其制造方法
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Application No.: US14721386Application Date: 2015-05-26
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Publication No.: US09373622B2Publication Date: 2016-06-21
- Inventor: Huaxiang Yin , Hong Yang , Qingzhu Zhang , Qiuxia Xu
- Applicant: INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCES
- Applicant Address: CN Beijing
- Assignee: INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCES
- Current Assignee: INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCES
- Current Assignee Address: CN Beijing
- Agency: Drinker Biddle & Reath LLP
- Priority: CN201410484407 20140919
- Main IPC: H01L21/8238
- IPC: H01L21/8238 ; H01L27/092

Abstract:
An CMOS device comprises a plurality of NMOS transistors and a plurality of PMOS transistors, each of which comprises a gate stack constituted of a gate insulating layer and a gate metal layer on a substrate, a source/drain region in the substrate on both sides of the gate stack and a channel region below the gate stack, wherein the gate metal layer of each NMOS transistor comprising a first barrier layer, an NMOS work function adjusting layer, a second barrier layer, and a filling layer, and wherein the gate metal layer of each PMOS transistor comprising a first barrier layer, a PMOS work function adjusting layer, an NMOS work function adjusting layer, a second barrier layer, and a filling layer, and wherein the first barrier layer in the gate metal layer of the NMOS transistor and the first barrier layer in the gate metal layer of the PMOS transistor contain a doping ion to finely adjust the work function. The semiconductor device and the method for manufacturing the same according to the present disclosure utilize the sacrificial layer to diffuse impurity to the barrier layer so that the adjusting accuracy of the threshold voltage may be effectively improved, thereby facilitating in improving the whole performance of the device.
Public/Granted literature
- US20160086946A1 CMOS DEVICE AND METHOD FOR MANUFACTURING THE SAME Public/Granted day:2016-03-24
Information query
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