Invention Grant
- Patent Title: Laser ablation analysis system
- Patent Title (中): 激光消融分析系统
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Application No.: US13492923Application Date: 2012-06-10
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Publication No.: US09383260B1Publication Date: 2016-07-05
- Inventor: Jong Huyn Yoo , Randolph S. Tribe , Chunyi Liu
- Applicant: Jong Huyn Yoo , Randolph S. Tribe , Chunyi Liu
- Applicant Address: US CA Fremont
- Assignee: Applied Spectra, Inc.
- Current Assignee: Applied Spectra, Inc.
- Current Assignee Address: US CA Fremont
- Agency: Microtechnology Law & Analysis
- Agent Daniel L. Flamm
- Main IPC: G01J3/30
- IPC: G01J3/30 ; G01J3/443

Abstract:
Systems, methods, compositions, and apparatus for laser induced ablation spectroscopy are disclosed. A sample site position sensor, stage position motors operable to move the stage in three independent spatial coordinate directions, and a stage position control circuit can move an analysis sample site to selected coordinate positions for laser ablation. Light emitted from a plasma plume produced with laser ablation can be gathered into a lightguide fiber bundle that is subdivided into branches. One branch can convey a first portion of the light to a broadband spectrometer operable to analyze a relatively wide spectral segment, and a different branch can convey a second portion of the light to a high dispersion spectrometer operable to measure minor concentrations and/or trace elements. Emissions from a plasma plume can be simultaneously analyzed in various ways using a plurality of spectrometers having distinct and/or complementary capabilities.
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