Invention Grant
- Patent Title: MEMS scanner
- Patent Title (中): MEMS扫描仪
-
Application No.: US14403308Application Date: 2013-10-11
-
Publication No.: US09383577B2Publication Date: 2016-07-05
- Inventor: Kyungsu Kim , Junil Kim , Jonghyun Lee , Seunghwan Moon
- Applicant: KOREA OPTRON CORP.
- Applicant Address: KR Gwangju
- Assignee: KOREA OPTRON CORP.
- Current Assignee: KOREA OPTRON CORP.
- Current Assignee Address: KR Gwangju
- Agency: Hauptman Ham, LLP
- International Application: PCT/KR2013/009089 WO 20131011
- International Announcement: WO2015/053422 WO 20150416
- Main IPC: G02B26/08
- IPC: G02B26/08 ; G02B26/10
Abstract:
The present invention relates to a micro electro mechanical systems (MEMS) scanner, and more particularly, to an MEMS scanner for implementing stable driving while increasing a driving angle between a fixed electrode and a driving electrode using an MEMS process. The MEMs scanner comprises a lower frame, a pair of upper frames, a pair of levers, a pair of fixed electrode portions, and a driving electrode portion.
Public/Granted literature
- US20160131893A1 MEMS SCANNER Public/Granted day:2016-05-12
Information query
