Invention Grant
- Patent Title: Analyser arrangement for particle spectrometer
- Patent Title (中): 分析仪布置用于粒子光谱仪
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Application No.: US14363405Application Date: 2012-03-06
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Publication No.: US09437408B2Publication Date: 2016-09-06
- Inventor: Björn Wannberg
- Applicant: Björn Wannberg
- Applicant Address: SE Uppsala
- Assignee: SCIENTA OMICRON AB
- Current Assignee: SCIENTA OMICRON AB
- Current Assignee Address: SE Uppsala
- Agency: Morrison & Foerster LLP
- International Application: PCT/SE2012/050251 WO 20120306
- International Announcement: WO2013/133739 WO 20130912
- Main IPC: H01J37/05
- IPC: H01J37/05 ; H01J49/00 ; H01J49/06 ; H01J49/48

Abstract:
The present invention relates to a method for determining at least one parameter related to charged particles emitted from a particle emitting sample. The method comprises guiding a beam of charged particles into an entrance of a measurement region by means of a lens system, and detecting positions of the particles indicative of said at least one parameter within the measurement region. Furthermore, the method comprises deflecting the particle beam at least twice in the same coordinate direction before entrance of the particle beam into the measurement region. Thereby, both the position and the direction of the particle beam at the entrance of the measurement region can be controlled in a way that to some extent eliminates the need for physical manipulation of the sample. This in turn allows the sample to be efficiently cooled such that the energy resolution in energy measurements can be improved.
Public/Granted literature
- US20140361161A1 ANALYSER ARRANGEMENT FOR PARTICLE SPECTROMETER Public/Granted day:2014-12-11
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