Invention Grant
US09443693B2 Notched magnetic lens for improved sample access in an SEM 有权
用于在SEM中改善样品存取的缺口磁性透镜

Notched magnetic lens for improved sample access in an SEM
Abstract:
A magnetic immersion lens apparatus includes an outer pole piece and an inner pole piece with a gap therebetween. The outer pole piece has an opening that permits energetic particles from a target in front of the immersion lens to pass through the outer pole piece to an external detector. The outer or inner pole piece has one or more notches near the gap. This abstract is provided to comply with rules requiring an abstract that will allow a searcher or other reader to quickly ascertain the subject matter of the technical disclosure. It is submitted with the understanding that it will not be used to interpret or limit the scope or meaning of the claims.
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