Invention Grant
- Patent Title: Notched magnetic lens for improved sample access in an SEM
- Patent Title (中): 用于在SEM中改善样品存取的缺口磁性透镜
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Application No.: US14738632Application Date: 2015-06-12
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Publication No.: US09443693B2Publication Date: 2016-09-13
- Inventor: Christopher M. Sears
- Applicant: KLA-Tencor Corporation
- Applicant Address: US CA Milpitas
- Assignee: KLA-TENCOR CORPORATION
- Current Assignee: KLA-TENCOR CORPORATION
- Current Assignee Address: US CA Milpitas
- Agency: JDI Patent
- Agent Joshua D. Isenberg
- Main IPC: H01J37/141
- IPC: H01J37/141 ; H01J37/28

Abstract:
A magnetic immersion lens apparatus includes an outer pole piece and an inner pole piece with a gap therebetween. The outer pole piece has an opening that permits energetic particles from a target in front of the immersion lens to pass through the outer pole piece to an external detector. The outer or inner pole piece has one or more notches near the gap. This abstract is provided to comply with rules requiring an abstract that will allow a searcher or other reader to quickly ascertain the subject matter of the technical disclosure. It is submitted with the understanding that it will not be used to interpret or limit the scope or meaning of the claims.
Public/Granted literature
- US20150279610A1 NOTCHED MAGNETIC LENS FOR IMPROVED SAMPLE ACCESS IN AN SEM Public/Granted day:2015-10-01
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