公开(公告)号：US09443693B2

公开(公告)日：2016-09-13

申请号：US14738632

申请日：2015-06-12

Applicant: KLA-Tencor Corporation

Inventor： Christopher M. Sears

IPC: H01J37/141 ,  H01J37/28

CPC classification number: H01J37/141 ,  H01J37/28 ,  H01J2237/1405 ,  H01J2237/1415 ,  H01J2237/2807

Abstract: A magnetic immersion lens apparatus includes an outer pole piece and an inner pole piece with a gap therebetween. The outer pole piece has an opening that permits energetic particles from a target in front of the immersion lens to pass through the outer pole piece to an external detector. The outer or inner pole piece has one or more notches near the gap. This abstract is provided to comply with rules requiring an abstract that will allow a searcher or other reader to quickly ascertain the subject matter of the technical disclosure. It is submitted with the understanding that it will not be used to interpret or limit the scope or meaning of the claims.

Abstract translation: 磁浸透镜装置包括外极片和内极片之间的间隙。 外极片具有允许来自浸没透镜前方的目标物的高能粒子通过外极片的外部检测器的开口。 外部或内部极片在间隙附近具有一个或多个凹口。 提供该摘要以符合要求抽象的规则，允许搜索者或其他读者快速确定技术公开内容的主题。 提交它的理解是，它不会用于解释或限制权利要求的范围或含义。

公开(公告)号：US20150279610A1

公开(公告)日：2015-10-01

申请号：US14738632

申请日：2015-06-12

Applicant: KLA-Tencor Corporation

Inventor： Christopher M. Sears

IPC: H01J37/141 ,  H01J37/28

CPC classification number: H01J37/141 ,  H01J37/28 ,  H01J2237/1405 ,  H01J2237/1415 ,  H01J2237/2807

Abstract: A magnetic immersion lens apparatus includes an outer pole piece and an inner pole piece with a gap therebetween. The outer pole piece has an opening that permits energetic particles from a target in front of the immersion lens to pass through the outer pole piece to an external detector. The outer or inner pole piece has one or more notches near the gap. This abstract is provided to comply with rules requiring an abstract that will allow a searcher or other reader to quickly ascertain the subject matter of the technical disclosure. It is submitted with the understanding that it will not be used to interpret or limit the scope or meaning of the claims.

Abstract translation: 磁浸透镜装置包括外极片和内极片之间的间隙。 外极片具有允许来自浸没透镜前方的目标物的高能粒子通过外极片的外部检测器的开口。 外部或内部极片在间隙附近具有一个或多个凹口。 提供该摘要以符合要求抽象的规则，允许搜索者或其他读者快速确定技术公开内容的主题。 提交它的理解是，它不会用于解释或限制权利要求的范围或含义。

公开(公告)号：US09082580B2

公开(公告)日：2015-07-14

申请号：US14490565

申请日：2014-09-18

Applicant: KLA-Tencor Corporation

Inventor： Christopher M. Sears

IPC: H01J37/141 ,  H01J37/28

CPC classification number: H01J37/141 ,  H01J37/28 ,  H01J2237/1405 ,  H01J2237/1415 ,  H01J2237/2807

Abstract: A magnetic immersion lens apparatus includes an outer pole piece and an inner pole piece with a gap therebetween proximate a common axis of the first and second pole pieces. The outer pole piece has an opening that permits energetic particles from a target in front of the immersion lens to pass through the outer pole piece to an external detector. The outer or inner pole piece has one or more notches near the gap, including at least one notch that expands cone of acceptance through which the energetic particles can pass from the target to the external detector. This abstract is provided to comply with rules requiring an abstract that will allow a searcher or other reader to quickly ascertain the subject matter of the technical disclosure. It is submitted with the understanding that it will not be used to interpret or limit the scope or meaning of the claims.

Abstract translation: 磁浸式透镜装置包括外极片和内极片，其间具有间隙，靠近第一和第二极片的共同轴线。 外极片具有允许来自浸没透镜前方的目标物的高能粒子通过外极片的外部检测器的开口。 外部或内部极片具有在间隙附近的一个或多个凹口，包括至少一个凹口，其扩大锥形接收，高能粒子可以通过该凹槽从目标传递到外部探测器。 提供该摘要以符合要求抽象的规则，允许搜索者或其他读者快速确定技术公开内容的主题。 提交它的理解是，它不会用于解释或限制权利要求的范围或含义。

公开(公告)号：US20150083926A1

公开(公告)日：2015-03-26

申请号：US14490565

申请日：2014-09-18

Applicant: KLA-Tencor Corporation

Inventor： Christopher M. Sears

IPC: H01J37/141 ,  H01J37/28

CPC classification number: H01J37/141 ,  H01J37/28 ,  H01J2237/1405 ,  H01J2237/1415 ,  H01J2237/2807

Abstract: A magnetic immersion lens apparatus includes an outer pole piece and an inner pole piece with a gap therebetween proximate a common axis of the first and second pole pieces. The outer pole piece has an opening that permits energetic particles from a target in front of the immersion lens to pass through the outer pole piece to an external detector. The outer or inner pole piece has one or more notches near the gap, including at least one notch that expands cone of acceptance through which the energetic particles can pass from the target to the external detector. This abstract is provided to comply with rules requiring an abstract that will allow a searcher or other reader to quickly ascertain the subject matter of the technical disclosure. It is submitted with the understanding that it will not be used to interpret or limit the scope or meaning of the claims.

Abstract translation: 磁浸式透镜装置包括外极片和内极片，其间具有间隙，靠近第一和第二极片的共同轴线。 外极片具有允许来自浸没透镜前方的目标物的高能粒子通过外极片的外部检测器的开口。 外部或内部极片具有在间隙附近的一个或多个凹口，包括至少一个凹口，其扩大锥形接收，高能粒子可以通过该凹槽从目标传递到外部探测器。 提供该摘要以符合要求抽象的规则，允许搜索者或其他读者快速确定技术公开内容的主题。 提交它的理解是，它不会用于解释或限制权利要求的范围或含义。