Invention Grant
US09460889B2 Charged particle microscope device and image capturing method 有权
带电粒子显微镜装置及摄像方法

Charged particle microscope device and image capturing method
Abstract:
A specimen image capture method using a charged particle microscope device includes: a first image acquisition step in which the gain of a detector in a charged particle microscope is set to a first gain value, charged particle beam scanning is carried out on a specimen, and a first image is obtained; a second image acquisition step in which the gain of the detector is set to a second gain value, which is different to the first gain value, charged particle beam scanning is carried out on the specimen, and a second image is obtained; and an image combination step in which the first gain value and the second gain value are used and the first image and the second image are combined.
Public/Granted literature
Information query
Patent Agency Ranking
0/0