Invention Grant
- Patent Title: Charged particle microscope device and image capturing method
- Patent Title (中): 带电粒子显微镜装置及摄像方法
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Application No.: US14110758Application Date: 2012-04-11
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Publication No.: US09460889B2Publication Date: 2016-10-04
- Inventor: Kenji Nakahira , Atsushi Miyamoto
- Applicant: Kenji Nakahira , Atsushi Miyamoto
- Applicant Address: JP Tokyo
- Assignee: Hitachi High-Technologies Corporation
- Current Assignee: Hitachi High-Technologies Corporation
- Current Assignee Address: JP Tokyo
- Agency: Mattingly & Malur, PC
- Priority: JP2011-090628 20110415
- International Application: PCT/JP2012/002498 WO 20120411
- International Announcement: WO2012/140874 WO 20121018
- Main IPC: H01J37/00
- IPC: H01J37/00 ; H01J37/26 ; H01J37/244 ; H01J37/28

Abstract:
A specimen image capture method using a charged particle microscope device includes: a first image acquisition step in which the gain of a detector in a charged particle microscope is set to a first gain value, charged particle beam scanning is carried out on a specimen, and a first image is obtained; a second image acquisition step in which the gain of the detector is set to a second gain value, which is different to the first gain value, charged particle beam scanning is carried out on the specimen, and a second image is obtained; and an image combination step in which the first gain value and the second gain value are used and the first image and the second image are combined.
Public/Granted literature
- US20140092231A1 CHARGED PARTICLE MICROSCOPE DEVICE AND IMAGE CAPTURING METHOD Public/Granted day:2014-04-03
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