Invention Grant
US09488468B2 Displacement sensor, spectral characteristic measuring apparatus, color measuring apparatus, planar measured object quality monitoring apparatus, displacement measuring method, spectral characteristic measuring method, and color measuring method
有权
位移传感器，光谱特征测量装置，颜色测量装置，平面测量对象质量监测装置，位移测量方法，光谱特征测量方法和颜色测量方法
- Patent Title: Displacement sensor, spectral characteristic measuring apparatus, color measuring apparatus, planar measured object quality monitoring apparatus, displacement measuring method, spectral characteristic measuring method, and color measuring method
- Patent Title (中): 位移传感器，光谱特征测量装置，颜色测量装置，平面测量对象质量监测装置，位移测量方法，光谱特征测量方法和颜色测量方法
-
Application No.: US14051855Application Date: 2013-10-11
-
Publication No.: US09488468B2Publication Date: 2016-11-08
- Inventor: Atsushi Tsujii , Naomichi Chida , Kazufumi Nishida
- Applicant: YOKOGAWA ELECTRIC CORPORATION
- Applicant Address: JP Tokyo
- Assignee: YOKOGAWA ELECTRIC CORPORATION
- Current Assignee: YOKOGAWA ELECTRIC CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Sughrue Mion, PLLC
- Priority: JP2012-227038 20121012
- Main IPC: G01B11/14
- IPC: G01B11/14 ; G01J3/28 ; G01N21/55 ; G01N21/25 ; G01J1/04 ; G01J1/42 ; G01J3/42 ; G01J3/02 ; G01J3/10 ; G01J3/18 ; G01B11/02 ; G01B11/06 ; G01J3/50
Abstract:
A displacement sensor includes a light source unit configured to apply light with different plural wavelengths in a direction oblique to a measurement region of a planar measured object, a spectroscope configured to measure spectral distribution of light reflected by the measurement region, a feature amount extracting module configured to extract a feature amount of the spectral distribution, and a displacement calculating module configured to calculate displacement of the measurement region based on the extracted feature amount and a relation between displacement and a feature amount acquired previously.
Public/Granted literature
Information query
