Invention Grant
US09488524B2 Spectroscopic measurement device having diffraction grating at conjugate plane of relay lens
有权
在中继透镜的共轭平面处具有衍射光栅的光谱测量装置
- Patent Title: Spectroscopic measurement device having diffraction grating at conjugate plane of relay lens
- Patent Title (中): 在中继透镜的共轭平面处具有衍射光栅的光谱测量装置
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Application No.: US14430658Application Date: 2013-10-02
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Publication No.: US09488524B2Publication Date: 2016-11-08
- Inventor: Ichiro Ishimaru
- Applicant: NATIONAL UNIVERSITY CORPORATION KAGAWA UNIVERSITY
- Applicant Address: JP Takamatsu-shi
- Assignee: NATIONAL UNIVERSITY CORPORATION KAGAWA UNIVERSITY
- Current Assignee: NATIONAL UNIVERSITY CORPORATION KAGAWA UNIVERSITY
- Current Assignee Address: JP Takamatsu-shi
- Agency: Oliff PLC
- Priority: JP2012-223460 20121005
- International Application: PCT/JP2013/076871 WO 20131002
- International Announcement: WO2014/054708 WO 20140410
- Main IPC: G01J3/02
- IPC: G01J3/02 ; G01J3/45 ; G01J3/28 ; G01J3/453 ; G01N21/35

Abstract:
A spectroscopic measurement device includes: a dividing optical system for dividing a measurement beam emitted from each of a plurality of measurement points located within a measurement area of an object to be measured, into a first measurement beam and a second measurement beam; an imaging optical system; an optical path length difference providing means; a detector including a plurality of pixels; a processor for acquiring an interferogram of a measurement point of the object to be measured; a conjugate plane imaging optical system located between the object to be measured and the dividing optical system; and a periodicity providing means located on the conjugate plane.
Public/Granted literature
- US20150268097A1 SPECTROSCOPIC MEASUREMENT DEVICE Public/Granted day:2015-09-24
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