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US09488524B2 Spectroscopic measurement device having diffraction grating at conjugate plane of relay lens 有权
在中继透镜的共轭平面处具有衍射光栅的光谱测量装置

Spectroscopic measurement device having diffraction grating at conjugate plane of relay lens
Abstract:
A spectroscopic measurement device includes: a dividing optical system for dividing a measurement beam emitted from each of a plurality of measurement points located within a measurement area of an object to be measured, into a first measurement beam and a second measurement beam; an imaging optical system; an optical path length difference providing means; a detector including a plurality of pixels; a processor for acquiring an interferogram of a measurement point of the object to be measured; a conjugate plane imaging optical system located between the object to be measured and the dividing optical system; and a periodicity providing means located on the conjugate plane.
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