Invention Grant
- Patent Title: Multi-beam particle microscope and method for operating same
- Patent Title (中): 多光束粒子显微镜及其操作方法
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Application No.: US14724541Application Date: 2015-05-28
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Publication No.: US09536702B2Publication Date: 2017-01-03
- Inventor: Uwe Lang , Christian Crueger , Nico Kaemmer , Christof Riedesel
- Applicant: Carl Zeiss Microscopy GmbH
- Applicant Address: DE Jena
- Assignee: Carl Zeiss Microscopy GmbH
- Current Assignee: Carl Zeiss Microscopy GmbH
- Current Assignee Address: DE Jena
- Agency: Fish & Richardson P.C.
- Priority: DE102014008105 20140530
- Main IPC: H01J37/26
- IPC: H01J37/26 ; H01J37/00 ; H01J37/22 ; H01J37/28 ; H01J37/244

Abstract:
A multi-beam particle microscope includes first particle optics in order to direct particle beams onto an object, a detector with detection regions, with a transducer being assigned to each detection region, and a data acquisition system, which has a control computer system, image recording computer systems and a screen. The image recording computer systems receive electrical signals from the transducers and generates a first file, which represents a high resolution image, and a second file, which represents a low resolution image. The control computer system maintains a data structure which represents an assignment of transducers to two-dimensional spatial vectors and depicts the images on the screen, wherein a reference point in each image is arranged on the screen in a coordinate system of the screen at a location which is defined by a sum of a leading vector, which is the same for all images, and the spatial vector.
Public/Granted literature
- US20150348749A1 MULTI-BEAM PARTICLE MICROSCOPE AND METHOD FOR OPERATING SAME Public/Granted day:2015-12-03
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