A method and chemical delivery system are provided. The method includes providing a non-aqueous hydrogen peroxide solution having a vapor phase separated from the substantially non-aqueous hydrogen peroxide solution by a membrane. The method further includes contacting a carrier gas or vacuum with the vapor phase and delivering a gas stream comprising hydrogen peroxide to a critical process or application. The chemical delivery system includes a non-aqueous hydrogen peroxide solution having a vapor phase separated from the substantially non-aqueous hydrogen peroxide solution by a membrane. The system further includes a carrier gas or vacuum in fluid contact with the vapor phase and an apparatus for delivering a gas stream comprising at least one component of the hydrogen peroxide solution to a critical process or application.