Invention Grant
- Patent Title: Gauge for installation of liners in substrate spin coating tools
- Patent Title (中): 衬垫旋转涂层工具中衬垫安装量规
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Application No.: US14671058Application Date: 2015-03-27
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Publication No.: US09574864B2Publication Date: 2017-02-21
- Inventor: Jeffrey J. Grimes , Kevin C. Remillard , Matthew F. Stanton
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Schmeiser, Olsen & Watts
- Agent Steven Meyers
- Main IPC: B05C11/08
- IPC: B05C11/08 ; B05D3/12 ; G01B5/25 ; B05D1/00 ; G01B5/28 ; H01L21/67 ; G03F7/16

Abstract:
A gauge and method of use. The gauge includes a body configured to removeably mount to substrate chuck of a spin apply coating tool, the body rotatable about an axis passing through a center of the chuck; an extendable arm having a first end mounted to the body, the extendable arm having a retracted position and a deployed position, a second end of the arm including an upper finger and a lower finger, the upper finger configured to be positioned above a rim of the coat apply bowl and the lower finger positioned below the rim of the coat apply bowl in the deployed position when the coat apply bowl is mounted in the spin apply tool; and wherein the gauge provides an error indication when the gauge is rotated about the axis and the coat apply bowl is not installed in the spin apply coating tool correctly.
Public/Granted literature
- US20160282100A1 GAUGE FOR INSTALLATION OF LINERS IN SUBSTRATE SPIN COATING TOOLS Public/Granted day:2016-09-29
Information query
IPC分类: