Invention Grant
- Patent Title: Developing apparatus, developing method and storage medium
- Patent Title (中): 显影装置,显影方法和存储介质
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Application No.: US14450704Application Date: 2014-08-04
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Publication No.: US09575411B2Publication Date: 2017-02-21
- Inventor: Kousuke Yoshihara , Hideharu Kyouda , Koshi Muta , Taro Yamamoto , Yasushi Takiguchi
- Applicant: TOKYO ELECTRON LIMITED
- Applicant Address: JP Minato-Ku
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Minato-Ku
- Agency: Burr & Brown, PLLC
- Priority: JP2013-162611 20130805
- Main IPC: B05C11/08
- IPC: B05C11/08 ; G03F7/30 ; H01L21/67 ; B05C5/02 ; B05D1/00 ; B05D1/26

Abstract:
A developing apparatus includes: a substrate holder that hold a substrate horizontally; a developer nozzle that supplies a developer onto the substrate to form a liquid puddle; a turning flow generation mechanism including a rotary member that rotates about an axis perpendicular to the substrate while the rotary member is being in contact with the liquid puddle thereby to generate a turning flow in the liquid puddle of the developer formed on the substrate; and a moving mechanism for moving the turning flow generation mechanism along a surface of the substrate. The line-width uniformity of a pattern can be improved by forming turning flows in a desired region of the substrate and stirring the developer.
Public/Granted literature
- US20150036110A1 DEVELOPING APPARATUS, DEVELOPING METHOD AND STORAGE MEDIUM Public/Granted day:2015-02-05
Information query
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