Invention Grant
US09576769B2 Weak signal detection system and electron microscope equipped with same
有权
弱信号检测系统和电子显微镜配备相同
- Patent Title: Weak signal detection system and electron microscope equipped with same
- Patent Title (中): 弱信号检测系统和电子显微镜配备相同
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Application No.: US14913029Application Date: 2014-06-13
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Publication No.: US09576769B2Publication Date: 2017-02-21
- Inventor: Hisaaki Kanai , Wen Li , Masami Makuuchi
- Applicant: Hitachi, Ltd.
- Applicant Address: JP Tokyo
- Assignee: Hitachi, Ltd.
- Current Assignee: Hitachi, Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Crowell & Moring LLP
- Priority: JP2013-175142 20130827
- International Application: PCT/JP2014/065668 WO 20140613
- International Announcement: WO2015/029542 WO 20150305
- Main IPC: H01J37/00
- IPC: H01J37/00 ; H01J37/22 ; H01J37/28 ; H01J37/26 ; H01J37/244

Abstract:
This weak signal detection system has: a statistical data acquisition unit which measures the average value or distribution of an input signal in which is noise superimposed on a desired signal, calculates parameters such as the amplitude or noise dispersion of the desired signal, and outputs the calculated data obtained thereby; a nonlinear characteristic unit which outputs a signal having a nonlinear response with respect to the magnitude of the voltage or the current of the input signal; a signal detection ratio evaluation unit which determines whether the output signal from the nonlinear characteristic unit is the desired signal, calculates the detection ratio in the event that the signal is the desired signal, and outputs detection ratio data; a parameter adjustment unit which, on the basis of detection ratio data obtained by the signal detection ratio evaluation unit and calculated data obtained by the statistical data acquisition unit, adjusts a control parameter pertaining to the responsiveness of the nonlinear characteristic unit; and a signal processing unit which performs signal processing of the output signal of the nonlinear characteristic unit, and conversion to digital data or image data. In so doing, it is possible to provide a weak signal detection system having improved signal detection accuracy, and an electron microscope equipped with the system.
Public/Granted literature
- US20160211110A1 Weak Signal Detection System and Electron Microscope Equipped with Same Public/Granted day:2016-07-21
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