Invention Grant
- Patent Title: Electron spectrometer and measurement method
-
Application No.: US15064954Application Date: 2016-03-09
-
Publication No.: US09613790B2Publication Date: 2017-04-04
- Inventor: Yasuhide Nakagawa
- Applicant: JEOL Ltd.
- Applicant Address: JP Tokyo
- Assignee: JEOL Ltd.
- Current Assignee: JEOL Ltd.
- Current Assignee Address: JP Tokyo
- Agency: The Webb Law Firm
- Priority: JP2015-049438 20150312
- Main IPC: H01J49/00
- IPC: H01J49/00 ; H01J49/48 ; H01J49/44 ; H01J37/22 ; H01J37/285 ; G01N23/227

Abstract:
An electron spectrometer includes: an energy analyzer section that energy-analyzes electrons emitted from a specimen; a micro-channel plate that amplifies the electrons analyzed by the energy analyzer section; a fluorescent screen that converts the electrons amplified by the micro-channel plate into light; a camera that photographs the fluorescent screen; and an effective range calculation section that calculates an effective range of the fluorescent screen within a camera image photographed by the camera, the effective range calculation section performing a process that acquires a plurality of the camera images photographed while causing the energy analyzer section to analyze the electrons with a different center energy, a process that converts the plurality of camera images respectively into a plurality of spectra, and a process that calculates the effective range of the fluorescent screen within the camera image based on the plurality of spectra.
Public/Granted literature
- US20160268119A1 Electron Spectrometer and Measurement Method Public/Granted day:2016-09-15
Information query