- Patent Title: Electrostatic multipole device, electrostatic multipole arrangement, charged particle beam device, and method of manufacturing an electrostatic multipole device
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Application No.: US14947609Application Date: 2015-11-20
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Publication No.: US09620329B1Publication Date: 2017-04-11
- Inventor: Benjamin John Cook , Dieter Winkler
- Applicant: ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Applicant Address: DE Heimstetten
- Assignee: ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Current Assignee: ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Current Assignee Address: DE Heimstetten
- Agency: Kilpatrick Townsend & Stockton LLP
- Main IPC: H01J37/00
- IPC: H01J37/00 ; H01J37/147 ; H01J37/153 ; H01J37/12

Abstract:
An electrostatic multipole device for influencing a charged particle beam propagating along an optical axis is described. The multipole device includes a first electrical contact, a second electrical contact, and a high-resistance layer which extends at least partially around the optical axis and is configured to allow a current flow between the first electrical contact and the second electrical contact, wherein the first electrical contact contacts the high-resistance layer at a first circumferential position and is configured to provide a first potential to the first circumferential position, and wherein the second electrical contact contacts the high-resistance layer at a second circumferential position at an angular distance from the first circumferential position and is configured to provide a second potential to the second circumferential position. Further, an electrostatic multipole arrangement including two or more such multipole devices and a charged particle beam device are described.
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