Invention Grant
- Patent Title: Method for forming a micro-surface structure and for producing a micro-electromechanical component
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Application No.: US13129601Application Date: 2009-11-17
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Publication No.: US09637377B2Publication Date: 2017-05-02
- Inventor: Wolfgang Reinert , Jochen Quenzer , Kai Gruber , Stephan Warnat
- Applicant: Wolfgang Reinert , Jochen Quenzer , Kai Gruber , Stephan Warnat
- Applicant Address: DE Munich
- Assignee: Fraunhofer-Gesellschaft zur Foerderung der Angewandten Forschung E.V.
- Current Assignee: Fraunhofer-Gesellschaft zur Foerderung der Angewandten Forschung E.V.
- Current Assignee Address: DE Munich
- Agency: Stevens & Showalter, LLP
- Priority: DE102008057858 20081118; DE102008060796 20081205
- International Application: PCT/EP2009/065293 WO 20091117
- International Announcement: WO2010/057878 WO 20100527
- Main IPC: B05D5/12
- IPC: B05D5/12 ; B81C1/00 ; B81B7/00 ; G01J5/04 ; H01L23/26 ; B32B3/30
Abstract:
The present invention relates to a method for forming a micro-surface structure on a substrate, in particular for producing a micro-electromechanical component, a micro-surface structure of this type, a method for producing a micro-electromechanical component having a micro-surface structure of this type and such a micro-electromechanical component. The invention is particularly relevant for components of microsystem technology (MST, micro-electromechanical systems MEMS) and the construction and connection technology for hermetically housing micro components, preferably using getter materials.
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