Invention Grant
- Patent Title: High-efficiency line-forming optical systems and methods
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Application No.: US15191941Application Date: 2016-06-24
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Publication No.: US09638922B2Publication Date: 2017-05-02
- Inventor: Serguei Anikitchev
- Applicant: Ultratech, Inc.
- Applicant Address: US CA San Jose
- Assignee: Ultratech, Inc.
- Current Assignee: Ultratech, Inc.
- Current Assignee Address: US CA San Jose
- Agency: Opticus IP Law PLLC
- Main IPC: H01L21/428
- IPC: H01L21/428 ; G02B27/09 ; B23K26/00 ; H01L21/324 ; H01L21/322 ; G02B17/06 ; H01L21/477 ; B23K26/06 ; B23K26/073 ; B23K26/08 ; B23K26/354 ; B23K26/352 ; B23K26/066 ; B23K26/082 ; G02B17/00 ; H01L21/225 ; H01L21/268 ; B23K103/00 ; B23K101/40
Abstract:
A line-forming optical system and method are disclosed that form a line image with high-efficiency. A method includes forming a laser beam having a first intensity profile with a Gaussian distribution in at least a first direction and passing at least 50% of the laser beam in the first direction to form a first transmitted light. The method also includes: focusing the first transmitted light at an intermediate image plane to define a second intensity profile having a central peak and first side peaks immediately adjacent the central peak; then truncating the second intensity profile within each of first side peaks to define a second transmitted light; and then forming the line image at an image plane from the second transmitted light.
Public/Granted literature
- US20160306177A1 High-efficiency line-forming optical systems and methods Public/Granted day:2016-10-20
Information query
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