Invention Grant
- Patent Title: Self calibration for mirror positioning in optical MEMS interferometers
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Application No.: US14165997Application Date: 2014-01-28
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Publication No.: US09658053B2Publication Date: 2017-05-23
- Inventor: Mostafa Medhat , Bassem Mortada , Ahmed Othman El Shater , Muhammed Nagy , Mina Gad Seif , Bassam A. Saadany , Amr N. Hafez
- Applicant: Si-Ware Systems
- Applicant Address: EG Cairo
- Assignee: Si-Ware Systems
- Current Assignee: Si-Ware Systems
- Current Assignee Address: EG Cairo
- Agency: Loza & Loza, LLP
- Agent Holly L. Rudnick
- Main IPC: G01B9/02
- IPC: G01B9/02 ; G02B26/08 ; G01B7/06 ; G01J3/45 ; G01J3/453
Abstract:
A Micro-Electro-Mechanical System (MEMS) interferometer provides for self-calibration of mirror positioning of a moveable mirror. The moveable mirror is coupled to a MEMS actuator having a variable capacitance. The MEMS interferometer includes a capacitive sensing circuit for determining the capacitance of the MEMS actuator at two or more known positions of the moveable mirror and a calibration module for using the actuator capacitances at the known positions to compensate for any drift in the capacitive sensing circuit.
Public/Granted literature
- US20140139839A1 Self Calibration for mirror positioning in Optical MEMS Interferometers Public/Granted day:2014-05-22
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