Invention Grant
- Patent Title: Intelligent hardstop for gap detection and control mechanism
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Application No.: US15001672Application Date: 2016-01-20
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Publication No.: US09663859B2Publication Date: 2017-05-30
- Inventor: Somesh Khandelwal , Garry K. Kwong , Kevin Griffin , Joseph Yudovsky
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Servilla Whitney LLC
- Main IPC: C23C16/52
- IPC: C23C16/52 ; C23C16/54 ; H01L21/67 ; C23C16/455 ; G01D5/34 ; G01B11/14

Abstract:
Apparatus and methods for measuring the proximity between two components using a hardstop, an actuator and an emitter/detector passing light through a passage in the actuator are disclosed. The passage provides attenuation to the light which changes as the gap between the components changes allowing the measurement and control of the gap. Methods of determining the topology of the components using the apparatus are also described.
Public/Granted literature
- US20160215396A1 Intelligent Hardstop For Gap Detection And Control Mechanism Public/Granted day:2016-07-28
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