Invention Grant
- Patent Title: Projection-type charged particle optical system and imaging mass spectrometry apparatus
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Application No.: US15398625Application Date: 2017-01-04
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Publication No.: US09679756B2Publication Date: 2017-06-13
- Inventor: Kota Iwasaki
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Canon U.S.A. Inc., IP Division
- Priority: JP2014-040967 20140303; JP2015-033378 20150223
- Main IPC: H01J49/16
- IPC: H01J49/16 ; H01J49/40 ; H01J49/00 ; H01J49/06

Abstract:
Provided is a projection-type charged particle optical system in which a projection magnification can be changed while a decrease in the accuracy in measuring a mass-to-charge ratio is being suppressed. A projection-type charged particle optical system according to the present invention includes a first electrode disposed so as to face a sample and having an opening formed therein for allowing a charged particle to pass, a second electrode disposed on a side of the first electrode opposite to where the sample is disposed and having an opening formed therein for allowing the charged particle to pass, and a flight-tube electrode disposed such that the charged particle that has been emitted from the sample and has passed through the second electrode enters the flight-tube electrode and being configured to form a substantially equipotential space thereinside. A principal plane is formed at at least two positions in a travel path of the charged particle.
Public/Granted literature
- US20170117127A1 PROJECTION-TYPE CHARGED PARTICLE OPTICAL SYSTEM AND IMAGING MASS SPECTROMETRY APPARATUS Public/Granted day:2017-04-27
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