- Patent Title: System and method for transverse pumping of laser-sustained plasma
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Application No.: US14675322Application Date: 2015-03-31
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Publication No.: US09723703B2Publication Date: 2017-08-01
- Inventor: Ilya Bezel , Anatoly Shchemelinin , Richard Solarz , Sebaek Oh , Matthew Derstine
- Applicant: KLA-Tencor Corporation
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Corporation
- Current Assignee: KLA-Tencor Corporation
- Current Assignee Address: US CA Milpitas
- Agency: Suiter Swantz pc llo
- Main IPC: H05G2/00
- IPC: H05G2/00 ; H01J61/02 ; H01J61/30 ; H01J65/04

Abstract:
A laser-sustained plasma light source for transverse plasma pumping includes a pump source configured to generate pumping illumination, one or more illumination optical elements and a gas containment structure configured to contain a volume of gas. The one or more illumination optical elements are configured to sustain a plasma within the volume of gas of the gas containment structure by directing pump illumination along a pump path to one or more focal spots within the volume of gas. The one or more collection optical elements are configured to collect broadband radiation emitted by the plasma along a collection path. Further, the illumination optical elements are configured to define the pump path such that pump illumination impinges the plasma along a direction transverse to a direction of propagation of the emitted broadband light of the collection path such that the pump illumination is substantially decoupled from the emitted broadband radiation.
Public/Granted literature
- US20150282288A1 System and Method for Transverse Pumping of Laser-Sustained Plasma Public/Granted day:2015-10-01
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