Invention Grant
- Patent Title: Method for coincident alignment of a laser beam and a charged particle beam
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Application No.: US14991507Application Date: 2016-01-08
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Publication No.: US09754764B2Publication Date: 2017-09-05
- Inventor: Marcus Straw , Mark Emerson
- Applicant: FEI Company
- Applicant Address: US OR Hillsboro
- Assignee: FEI Company
- Current Assignee: FEI Company
- Current Assignee Address: US OR Hillsboro
- Agency: Scheinberg & Associates, P.C.
- Agent Michael O. Scheinberg
- Main IPC: H01J37/00
- IPC: H01J37/00 ; H01J37/304 ; H01J37/22 ; H01J37/305 ; G21K5/00 ; G21K5/08
Abstract:
A method and apparatus for aligning a laser beam coincident with a charged particle beam. The invention described provides a method for aligning the laser beam through the center of an objective lens and ultimately targeting the eucentric point of a multi-beam system. The apparatus takes advantage of components of the laser beam alignment system being positioned within and outside of the vacuum chamber of the charged particle system.
Public/Granted literature
- US20160126059A1 METHOD FOR COINCIDENT ALIGNMENT OF A LASER BEAM AND A CHARGED PARTICLE BEAM Public/Granted day:2016-05-05
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