Invention Grant
- Patent Title: Electron microscope and method of operating the same
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Application No.: US13915652Application Date: 2013-06-12
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Publication No.: US09772976B2Publication Date: 2017-09-26
- Inventor: Takashi Suzuki
- Applicant: JEOL Ltd.
- Applicant Address: JP Tokyo
- Assignee: JEOL Ltd.
- Current Assignee: JEOL Ltd.
- Current Assignee Address: JP Tokyo
- Agency: The Webb Law Firm
- Priority: JP2012-132927 20120612
- Main IPC: H01J37/28
- IPC: H01J37/28 ; G06F17/18 ; H01J37/285

Abstract:
An electron microscope and method of operating an electron microscope (1) has an electron beam source (11) for producing an electron beam, a noise canceling aperture (12) for detecting a part of the beam, an amplifier (42), an effective value calculating circuit (44) for extracting DC components of the output signal from the amplifier (42), a detector (15) for detecting a signal obtained in response to impingement of the beam on a sample (A), a preamplifier circuit (20), an amplifier circuit (30), a dividing circuit (54) for performing a division based on the output signal from the amplifier circuit (30) and on the output signal from the amplifier (42), and a multiplier circuit (58) for performing multiplication of the output signal from the dividing circuit (54) and the output from the effective value calculating circuit (44).
Public/Granted literature
- US20130332116A1 Electron Microscope and Method of Operating the Same Public/Granted day:2013-12-12
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