Invention Grant
- Patent Title: Imprint apparatus and article manufacturing method
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Application No.: US15400081Application Date: 2017-01-06
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Publication No.: US09778565B2Publication Date: 2017-10-03
- Inventor: Hiroshi Sato
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: CANON KABUSHIKI KAISHA
- Current Assignee: CANON KABUSHIKI KAISHA
- Current Assignee Address: JP Tokyo
- Agency: Rossi, Kimms & McDowell LLP
- Priority: JP2010-269468 20101202; JP2011-255292 20111122
- Main IPC: B05C9/10
- IPC: B05C9/10 ; B05C11/00 ; B29C59/00 ; G03F7/00 ; B05C9/12 ; B05D3/06 ; B05D3/12 ; B05C11/10 ; H01L21/66 ; H01L21/3105

Abstract:
The imprint apparatus of the present invention includes a holding unit configured to hold a mold; a particle inspection unit configured to inspect whether or not particle is present on an imprint area, in which the resin pattern is formed, of the substrate; a dispenser configured to apply an uncured resin to the imprint area; a movable unit configured to move the imprint area with respect to the holding unit; and a controller. The movable unit is capable of moving the imprint area to each of an inspection position by means of the inspection unit, an application position by means of the dispenser, and a contacting position by means of the holding unit. Also, the controller causes the inspection unit to perform inspection of the imprint area in association with the movement of the imprint area by means of the movable unit.
Public/Granted literature
- US20170115559A1 IMPRINT APPARATUS AND ARTICLE MANUFACTURING METHOD Public/Granted day:2017-04-27
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