- Patent Title: Phase plate, method of fabricating same, and electron microscope
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Application No.: US15067394Application Date: 2016-03-11
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Publication No.: US09786467B2Publication Date: 2017-10-10
- Inventor: Hirofumi Iijima
- Applicant: JEOL Ltd.
- Applicant Address: JP Tokyo
- Assignee: JEOL Ltd.
- Current Assignee: JEOL Ltd.
- Current Assignee Address: JP Tokyo
- Agency: The Webb Law Firm
- Priority: JP2015-49439 20150312
- Main IPC: H01J37/04
- IPC: H01J37/04 ; H01J37/147 ; H01J37/26 ; H01J37/02

Abstract:
A phase plate capable of suppressing electrification and a method of fabricating the plate are provided. The phase plate is for use in an electron microscope and includes a phase control layer provided with a through-hole and at least one conductive layer covering and closing off the through-hole. The conductive layer is formed on at least one of a first surface and a second surface of the phase control layer, the second surface being on the opposite side of the first surface. The phase control layer produces a given phase difference between electron waves transmitted through the phase control layer and electron waves transmitted through the through-hole.
Public/Granted literature
- US20160276125A1 Phase Plate, Method of Fabricating Same, and Electron Microscope Public/Granted day:2016-09-22
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