Automated cleanliness diagnostic for mass spectrometer
Abstract:
A mass spectrometer or ion mobility spectrometer is disclosed comprising means for detecting a blockage in an inlet orifice arranged between an ion source and a vacuum chamber. The blockage is detected as a result of a reduction in pressure within the vacuum chamber. This change in pressure is detected indirectly by monitoring the amount of power that a vacuum pump is using, the amount of current that a vacuum pump is drawing, the temperature of a vacuum pump or a region in proximity to the vacuum pump, or the flow rate of gas out of a vacuum pump.
Public/Granted literature
Information query
Patent Agency Ranking
0/0