Invention Grant
- Patent Title: Chemical mapping using thermal microscopy at the micro and nano scales
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Application No.: US14748430Application Date: 2015-06-24
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Publication No.: US09841324B2Publication Date: 2017-12-12
- Inventor: Robert Furstenberg , Chris Kendziora , R. Andrew McGill , Viet K. Nguyen
- Applicant: Robert Furstenberg , Chris Kendziora , R. Andrew McGill , Viet K. Nguyen
- Applicant Address: US DC Washington
- Assignee: The United States of America, as represented by the Secretary of the Navy
- Current Assignee: The United States of America, as represented by the Secretary of the Navy
- Current Assignee Address: US DC Washington
- Agency: US Naval Research Laboratory
- Agent Rebecca L. Forman
- Main IPC: G01J3/28
- IPC: G01J3/28 ; G01J3/02 ; G01J5/60 ; G02B21/00 ; G01N21/17 ; G01J3/443 ; G01J3/45 ; G01N21/3563 ; G01N21/41 ; G01N21/45 ; G01N21/39

Abstract:
A non-destructive method for chemical imaging with ˜1 nm to 10 μm spatial resolution (depending on the type of heat source) without sample preparation and in a non-contact manner. In one embodiment, a sample undergoes photo-thermal heating using an IR laser and the resulting increase in thermal emissions is measured with either an IR detector or a laser probe having a visible laser reflected from the sample. In another embodiment, the infrared laser is replaced with a focused electron or ion source while the thermal emission is collected in the same manner as with the infrared heating. The achievable spatial resolution of this embodiment is in the 1-50 nm range.
Public/Granted literature
- US20160011049A1 CHEMICAL MAPPING USING THERMAL MICROSCOPY AT THE MICRO AND NANO SCALES Public/Granted day:2016-01-14
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