Invention Grant
- Patent Title: Method and device for sensing isotropic stress and providing a compensation for the piezo-hall effect
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Application No.: US14399623Application Date: 2013-05-07
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Publication No.: US09857247B2Publication Date: 2018-01-02
- Inventor: Samuel Huber , Johan Raman , Pieter Rombouts , Appolonius Jacobus Van Der Wiel
- Applicant: MELEXIS TECHNOLOGIES NV
- Applicant Address: BE Tessenderlo
- Assignee: MELEXIS TECHNOLOGIES NV
- Current Assignee: MELEXIS TECHNOLOGIES NV
- Current Assignee Address: BE Tessenderlo
- Agency: Workman Nydegger
- Agent Justin Cassell
- Priority: EP12167042 20120507
- International Application: PCT/EP2013/059545 WO 20130507
- International Announcement: WO2013/167631 WO 20131114
- Main IPC: G01R33/06
- IPC: G01R33/06 ; G01L1/22 ; G01R33/07 ; G01L1/18 ; G01R33/00 ; G01L1/12

Abstract:
A method determines isotropic stress by means of a Hall element which includes a plate-shaped area made of a doped semiconductor material and comprises four contacts contacting the plate-shaped area and forming corners of a quadrangle, two neighboring corners of the quadrangle defining an edge thereof. At least one van der Pauw transresistance value in at least one van der Pauw measurement set-up of the Hall element is determined, wherein the four contacts of the Hall element form contact pairs, a contact pair comprising two contacts defining neighboring corners of the quadrangle. One contact pair supplies a current and the other contact pair measures a voltage. A relationship between the supplied current and the measured voltage defines the Van der Pauw transresistance value. The method comprises determining a stress signal which depends on the at least one Van der Pauw transresistance value and determining isotropic stress.
Public/Granted literature
- US20150142342A1 Method and Device for Sensing Isotropic Stress and Providing a Compensation for the Piezo-Hall Effect Public/Granted day:2015-05-21
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