Invention Grant
- Patent Title: Method for manufacturing an electromechanical device and corresponding device
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Application No.: US15520618Application Date: 2015-11-09
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Publication No.: US09944512B2Publication Date: 2018-04-17
- Inventor: Joël Collet
- Applicant: TRONIC'S MICROSYSTEMS
- Applicant Address: FR Crolles
- Assignee: TRONICS MICROSYSTEMS
- Current Assignee: TRONICS MICROSYSTEMS
- Current Assignee Address: FR Crolles
- Agency: Marshall, Gerstein & Borun LLP
- Priority: FR1460871 20141110
- International Application: PCT/EP2015/076110 WO 20151109
- International Announcement: WO2016/075098 WO 20160519
- Main IPC: H01L29/84
- IPC: H01L29/84 ; B81B3/00 ; B81C1/00 ; G01L9/00
Abstract:
An electromechanical device includes a stack formed of an insulating layer interposed between two solid layers, and a micromechanical structure of predetermined thickness suspended above a recess of predetermined depth, the recess and the micromechanical structure forming one of the two solid layers of the stack, and the insulating layer forming the bottom of the recess.
Public/Granted literature
- US20170305739A1 METHOD FOR MANUFACTURING AN ELECTROMECHANICAL DEVICE AND CORRESPONDING DEVICE Public/Granted day:2017-10-26
Information query
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