公开(公告)号：US09944512B2

公开(公告)日：2018-04-17

申请号：US15520618

申请日：2015-11-09

Applicant: TRONIC'S MICROSYSTEMS

Inventor： Joël Collet

IPC: H01L29/84 ,  B81B3/00 ,  B81C1/00 ,  G01L9/00

CPC classification number: B81B3/0051 ,  B81C1/00182 ,  B81C1/00333 ,  B81C2201/0194 ,  B81C2203/051 ,  G01L9/0042

Abstract: An electromechanical device includes a stack formed of an insulating layer interposed between two solid layers, and a micromechanical structure of predetermined thickness suspended above a recess of predetermined depth, the recess and the micromechanical structure forming one of the two solid layers of the stack, and the insulating layer forming the bottom of the recess.

公开(公告)号：US10094851B2

公开(公告)日：2018-10-09

申请号：US14647651

申请日：2013-12-24

Applicant: Tronic's Microsystems ,  Commissariat A L'Energie Atomique Et Aux Energies Alternatives

Inventor： Francois-Xavier Boillot ,  Remi Laoubi ,  Guillaume Jourdan

IPC: G01P15/08 ,  B81B3/00 ,  G01P15/12 ,  G01P15/125 ,  G01P15/18

Abstract: The invention relates to a micro-electromechanical device used as a force sensor, comprising a mobile mass connected to at least one securing zone by means of springs or deformable elements, and means for detecting the movement of the mobile mass, the mobile mass having an outer frame and an inner body, the outer frame and the inner body being connected by at least two flexible portions forming integral decoupling springs on two separate sides of the outer frame.

公开(公告)号：US20170305739A1

公开(公告)日：2017-10-26

申请号：US15520618

申请日：2015-11-09

Applicant: TRONIC'S MICROSYSTEMS

Inventor： Joël COLLET

IPC: B81B3/00 ,  G01L9/00 ,  B81C1/00

CPC classification number: B81B3/0051 ,  B81C1/00182 ,  B81C1/00333 ,  B81C2201/0194 ,  B81C2203/051 ,  G01L9/0042

Abstract: An electromechanical device includes a stack formed of an insulating layer interposed between two solid layers, and a micromechanical structure of predetermined thickness suspended above a recess of predetermined depth, the recess and the micromechanical structure forming one of the two solid layers of the stack, and the insulating layer forming the bottom of the recess.

公开(公告)号：US20180346325A1

公开(公告)日：2018-12-06

申请号：US15780478

申请日：2016-11-15

Applicant: TRONIC'S MICROSYSTEMS

Inventor： Joël COLLET

IPC: B81C1/00

CPC classification number: B81C1/00333

Abstract: An electromechanical device includes a stack consisting of an insulating layer inserted between two solid layers. The device also includes a micromechanical structure suspended above a recess and a nanometric structure suspended above the recess. The relevant position of the nanometric structure relative to the micrometric structure is defined by the delimitation of the contours of the two structures by etching a first surface of a substrate consisting of a solid layer so as to obtain trenches that define the structures.

公开(公告)号：US20180004161A1

公开(公告)日：2018-01-04

申请号：US15544754

申请日：2016-02-12

Applicant: TRONIC'S MICROSYSTEMS

Inventor： Vincent Gaff ,  Pierre-Marie Visse ,  Luca Ribetto

IPC: G04B17/06 ,  G04B17/22

CPC classification number: G04B17/066 ,  B81B3/0081 ,  F16F1/021 ,  G04B17/04 ,  G04B17/22

Abstract: A mechanical oscillator endowed with a strip, with the aforesaid strip incorporating a first silicon layer having a crystal lattice extending along a first direction of one plane, a thermal compensation layer composed of a material having a Young's modulus thermal coefficient of opposite sign to that of the silicon, and a second silicon layer having a crystal lattice extending in a second direction of the plane, with the first and direction being offset at an angle of 45° within the plane of the layers, and with the thermal compensation layer extending between the first and second silicon layers.

公开(公告)号：US20150309069A1

公开(公告)日：2015-10-29

申请号：US14647651

申请日：2013-12-24

Applicant: Tronic's Microsystems ,  Commissariat A L'Energie Atomique Et Aux Energies Alternatives

Inventor： Francois-Xavier Boillot ,  Remi Laoubi ,  Guillaume Jourdan

IPC: G01P15/08 ,  G01P15/12 ,  G01P15/18

CPC classification number: G01P15/0802 ,  B81B3/0051 ,  B81B2201/025 ,  B81B2203/0154 ,  B81B2203/0163 ,  B81B2203/051 ,  B81B2203/058 ,  G01P15/123 ,  G01P15/125 ,  G01P15/18 ,  G01P2015/0817 ,  G01P2015/0871

Abstract: The invention relates to a micro-electromechanical device used as a force sensor, comprising a mobile mass connected to at least one securing zone by means of springs or deformable elements, and means for detecting the movement of the mobile mass, the mobile mass having an outer frame and an inner body, the outer frame and the inner body being connected by at least two flexible portions forming integral decoupling springs on two separate sides of the outer frame.

Abstract translation: 本发明涉及一种用作力传感器的微机电装置，其包括通过弹簧或可变形元件与至少一个固定区连接的移动体，以及用于检测移动体的运动的装置，所述移动体具有 外框架和内体，外框架和内主体通过在外框架的两个分开的侧面上形成整体解耦弹簧的至少两个柔性部分连接。