Invention Grant
- Patent Title: Process for manufacturing self-assembled block copolymer films
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Application No.: US14890240Application Date: 2014-05-09
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Publication No.: US09962733B2Publication Date: 2018-05-08
- Inventor: Michele Perego , Gabriele Seguini , Federico Ferrarese Lupi
- Applicant: CONSIGLIO NAZIONALE DELLE RICERCHE
- Applicant Address: IT Rome
- Assignee: CONSIGLIO NAZIONALE DELLE RICERCHE
- Current Assignee: CONSIGLIO NAZIONALE DELLE RICERCHE
- Current Assignee Address: IT Rome
- Agency: Nixon & Vanderhye P.C.
- Priority: ITRM2013A0278 20130510
- International Application: PCT/IB2014/061324 WO 20140509
- International Announcement: WO2014/181302 WO 20141113
- Main IPC: B05D3/06
- IPC: B05D3/06 ; C09D153/00 ; G03F7/00 ; B05D1/00 ; B05D3/00 ; B82Y30/00 ; B82Y40/00

Abstract:
Self-assembled block copolymer films having two or more blocks are manufactured by distributing a solution containing at least one block copolymer onto the substrate so as to partially coat a substrate surface, obtaining an intermediate product. A block copolymer is self-assembled by heating the intermediate product. The self-assembling step includes Rapid Thermal Processing, which is performed by heating the intermediate product up to a first target temperature, ranging from a glass transition temperature to an order-disorder transition temperature of the block copolymer, through a temperature rising ramp having a rate of temperature change not lower than 5° C./second; maintaining the intermediate product at the target temperature for a time interval not longer than 60 minutes, whereby a sample is obtained on the surface of which a self-assembled film of the block copolymer has been made; and cooling the sample down to the ambient temperature through a temperature descending ramp.
Public/Granted literature
- US20160082472A1 PROCESS FOR MANUFACTURING SELF-ASSEMBLED BLOCK COPOLYMER FILMS Public/Granted day:2016-03-24
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