Invention Grant
- Patent Title: Wafer level package solder barrier used as vacuum getter
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Application No.: US15270145Application Date: 2016-09-20
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Publication No.: US09966320B2Publication Date: 2018-05-08
- Inventor: Roland W. Gooch , Buu Q. Diep , Adam M. Kennedy , Stephen H. Black , Thomas A. Kocian
- Applicant: RAYTHEON COMPANY
- Applicant Address: US MA Waltham
- Assignee: RAYTHEON COMPANY
- Current Assignee: RAYTHEON COMPANY
- Current Assignee Address: US MA Waltham
- Agency: Lando & Anastasi, LLP
- Main IPC: H01L23/48
- IPC: H01L23/48 ; H01L23/02 ; H01L23/10 ; H01L23/498 ; H01L21/768 ; B81B7/00 ; H01L23/26 ; H01L27/146 ; B81C1/00 ; H01L21/52

Abstract:
An electronic device and methods of manufacture thereof. One or more methods may include providing a lid wafer having a cavity and a surface surrounding the cavity and a device wafer having a detector device and a reference device. In certain examples, a solder barrier layer of titanium material may be deposited onto the surface of the lid wafer. The solder barrier layer of titanium material may further be activated to function as a getter. In various examples, the lid wafer and the device wafer may be bonded together using solder, and the solder barrier layer of titanium material may prevent the solder from contacting the surface of the lid wafer.
Public/Granted literature
- US20170011977A1 WAFER LEVEL PACKAGE SOLDER BARRIER USED AS VACUUM GETTER Public/Granted day:2017-01-12
Information query
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