Invention Grant
- Patent Title: Inspection system having an expanded angular coverage
-
Application No.: US15132323Application Date: 2016-04-19
-
Publication No.: US09989480B2Publication Date: 2018-06-05
- Inventor: Noam Gordon , Itay Cohen
- Applicant: CAMTEK LTD.
- Applicant Address: IL Migdal Haemeq
- Assignee: CAMTEK LTD.
- Current Assignee: CAMTEK LTD.
- Current Assignee Address: IL Migdal Haemeq
- Agency: Reches Patents
- Main IPC: G01N21/95
- IPC: G01N21/95 ; H04N5/225 ; H04N5/369 ; G02B19/00

Abstract:
An inspection system having an expanded angular coverage, the inspection system may include a line camera; a first curved mirror; a second curved mirror; a first focusing lens that is positioned between the first mirror and an object; a second focusing lens that is positioned between the second mirror and the object; a first light source that is configured to direct a first part of a first light beam towards the first curved mirror and a second part of the first light beam towards the first focusing lens; a second light source that is configured to direct a first part of a second light beam towards the second curved mirror and a second part of the second light beam towards the second focusing lens.
Public/Granted literature
- US20160313258A1 INSPECTION SYSTEM HAVING AN EXPANDED ANGULAR COVERAGE Public/Granted day:2016-10-27
Information query