公开(公告)号：US09989480B2

公开(公告)日：2018-06-05

申请号：US15132323

申请日：2016-04-19

Applicant: CAMTEK LTD.

Inventor： Noam Gordon ,  Itay Cohen

IPC: G01N21/95 ,  H04N5/225 ,  H04N5/369 ,  G02B19/00

CPC classification number: G01N21/9515 ,  G01N2201/0636 ,  G01N2201/0638 ,  G02B19/0023 ,  G02B19/0028 ,  G02B19/0047 ,  H04N5/2254 ,  H04N5/2256 ,  H04N5/3692

Abstract: An inspection system having an expanded angular coverage, the inspection system may include a line camera; a first curved mirror; a second curved mirror; a first focusing lens that is positioned between the first mirror and an object; a second focusing lens that is positioned between the second mirror and the object; a first light source that is configured to direct a first part of a first light beam towards the first curved mirror and a second part of the first light beam towards the first focusing lens; a second light source that is configured to direct a first part of a second light beam towards the second curved mirror and a second part of the second light beam towards the second focusing lens.

公开(公告)号：US20160313258A1

公开(公告)日：2016-10-27

申请号：US15132323

申请日：2016-04-19

Applicant: CAMTEK LTD.

Inventor： Noam Gordon ,  Itay Cohen

IPC: G01N21/95 ,  G02B27/10 ,  G02B27/09 ,  H04N5/225 ,  G02B17/08

CPC classification number: G01N21/9515 ,  G01N2201/0636 ,  G01N2201/0638 ,  G02B19/0023 ,  G02B19/0028 ,  G02B19/0047 ,  H04N5/2254 ,  H04N5/2256 ,  H04N5/3692

Abstract: An inspection system having an expanded angular coverage, the inspection system may include a line camera; a first curved mirror; a second curved mirror; a first focusing lens that is positioned between the first mirror and an object; a second focusing lens that is positioned between the second mirror and the object; a first light source that is configured to direct a first part of a first light beam towards the first curved mirror and a second part of the first light beam towards the first focusing lens; a second light source that is configured to direct a first part of a second light beam towards the second curved mirror and a second part of the second light beam towards the second focusing lens.

Abstract translation: 具有扩大的角度覆盖的检查系统，检查系统可以包括线路相机; 第一个曲面镜; 第二个曲面镜; 位于第一反射镜和物体之间的第一聚焦透镜; 位于第二反射镜和物体之间的第二聚焦透镜; 第一光源，其被配置为将第一光束的第一部分朝向第一弯曲镜引导，并且第一光束的第二部分朝向第一聚焦透镜; 第二光源，被配置为将第二光束的第一部分引向第二曲面镜，第二光束的第二部分朝向第二聚焦透镜。