公开(公告)号：KR1020030060434A

公开(公告)日：2003-07-16

申请号：KR1020020001137

申请日：2002-01-09

Applicant: 삼성전자주식회사

Inventor： 김남용

IPC: G01L21/12

Abstract: PURPOSE: A vacuum gauge calibrating device is provided to calibrate simultaneously a plurality of vacuum gauge for measuring a vacuum degree provided to a chamber of semiconductor manufacturing equipment. CONSTITUTION: A vacuum chamber(100) is connected to a vacuum pump, and a control valve for adjusting a vacuum degree in the vacuum chamber is installed between the vacuum chamber(100) and the vacuum pump. A reference vacuum gauge for measuring the vacuum degree provided from the vacuum pump is connected to one side of the vacuum chamber. An electrical signal measured from the reference vacuum gauge is converted at a signal converter into a pressure. A first vacuum providing tube(112), a second vacuum providing tube(114), and an open/close valve(116) are connected to the other side of the vacuum chamber.

Abstract translation: 目的：提供真空计校准装置，以同时校准多个真空计，用于测量提供给半导体制造设备的腔室的真空度。 构成：将真空室（100）连接到真空泵，并且在真空室（100）和真空泵之间安装用于调节真空室中的真空度的控制阀。 用于测量从真空泵提供的真空度的参考真空计连接到真空室的一侧。 从参考真空计测量的电信号在信号转换器处被转换成压力。 第一真空供应管（112），第二真空供应管（114）和开/关阀（116）连接到真空室的另一侧。

公开(公告)号：KR1020040099926A

公开(公告)日：2004-12-02

申请号：KR1020030032066

申请日：2003-05-20

Applicant: 삼성전자주식회사

Inventor： 윤종왕 ,  고영민 ,  김남용

IPC: H01L21/02

Abstract: PURPOSE: A temperature correcting apparatus and a method of correcting temperature using the same are provided to reduce correcting time and cost and to improve the reliability of correction by correcting the temperature of a TC(Temperature Compensation) wafer in the apparatus without a disassembling or replacing process for the TC wafer using a temperature controller and a connector. CONSTITUTION: A temperature correcting apparatus includes a plate, a cover, a first temperature controller, a connector, and a second temperature controller. The plate(100) includes a first embedded hot wire(112b) and a first embedded temperature sensor(114b). The plate is used for loading a semiconductor substrate(130) with a plurality of thermocouples(140). The cover(110) includes a second embedded hot wire(112a) and a second embedded temperature sensor(114a). The cover is used for isolating the plate form the outside. The first temperature controller(120) controls the first and second wires and the first and second temperature sensors. The connector(150) is attached on the cover to connect the thermocouples to the outside. The second temperature controller(160) for controlling the thermocouples is connected with the connector.

Abstract translation: 目的：提供一种温度校正装置和使用其的温度校正方法，以减少校正时间和成本，并通过校正装置中的TC（温度补偿）晶片的温度而不进行拆卸或更换来提高校正的可靠性 使用温度控制器和连接器的TC晶片的处理。 构成：温度校正装置包括板，盖，第一温度控制器，连接器和第二温度控制器。 板（100）包括第一嵌入式热丝（112b）和第一嵌入式温度传感器（114b）。 该板用于加载具有多个热电偶（140）的半导体衬底（130）。 盖（110）包括第二嵌入式热丝（112a）和第二嵌入式温度传感器（114a）。 该盖用于从外部隔离板。 第一温度控制器（120）控制第一和第二线以及第一和第二温度传感器。 连接器（150）安装在盖上以将热电偶连接到外部。 用于控制热电偶的第二温度控制器（160）与连接器连接。

公开(公告)号：KR100503515B1

公开(公告)日：2005-07-26

申请号：KR1020030032066

申请日：2003-05-20

Applicant: 삼성전자주식회사

Inventor： 윤종왕 ,  고영민 ,  김남용

IPC: H01L21/02

Abstract: 온도 교정 장치 및 이를 이용한 온도 교정 방법이 개시되어 있다. 핫 플레이트, 오븐 또는 오일 베스 형태의 밀폐된 공간을 갖는 온도 교정 장치를 이용하여 상기 온도 교정 장치 내에 장착된 TC 웨이퍼를 외부로 노출시키지 않고 커넥터를 이용하여 온도를 측정하고, 상기 측정된 온도를 상기 온도 교정 장치 내의 분위기 온도와 비교하여 교정한다. 이와 같이, TC 웨이퍼를 분해하거나, 교체하지 않고 교정하여 시간 및 비용을 절약할 수 있으며, 공정의 신뢰도를 향상시킬 수 있다.

公开(公告)号：KR3001020860000S

公开(公告)日：1990-05-14

申请号：KR3019890004230

申请日：1989-04-03

Applicant: 삼성전자주식회사

Designer： 김남용

公开(公告)号：KR1020040076743A

公开(公告)日：2004-09-03

申请号：KR1020030012089

申请日：2003-02-26

Applicant: 삼성전자주식회사

Inventor： 김봉수 ,  김남용

IPC: G05B23/02

CPC classification number: G05B23/02 ,  G05B19/048 ,  H03M1/12 ,  H04L69/16

Abstract: PURPOSE: A system for monitoring the parameter of a semiconductor manufacturing device is provided to maintain an optimum status of the system by taking appropriate action, thereby obtaining a reliability of the system. CONSTITUTION: A system for monitoring the parameter of a semiconductor manufacturing device includes a probe unit(110), an analog-to-digital(A/D) converter(120) and an adapter(130). The probe unit(110) measures the parameter representing the state of the semiconductor manufacturing device and generates an analog signal by using the measured result. The A/D converter(120) converts the analog signal transmitted from the probe unit(110) into a digital signal. And, the adapter(130) converts the digital signal into a communication signal and transmits it to the main computer through the communication with the main computer to process the communication signal.

Abstract translation: 目的：提供一种用于监控半导体制造装置的参数的系统，通过采取适当的动作来维持系统的最佳状态，从而获得系统的可靠性。 构成：用于监测半导体制造装置的参数的系统包括探针单元（110），模数（A / D）转换器（120）和适配器（130）。 探针单元（110）测量表示半导体制造装置的状态的参数，并通过使用测量结果产生模拟信号。 A / D转换器（120）将从探测单元（110）发送的模拟信号转换为数字信号。 并且，适配器（130）将数字信号转换为通信信号，并通过与主计算机的通信将其发送到主计算机，以处理通信信号。

公开(公告)号：KR1020040063048A

公开(公告)日：2004-07-12

申请号：KR1020030000453

申请日：2003-01-04

Applicant: 삼성전자주식회사

Inventor： 김남용 ,  박경득

IPC: H01L21/00

Abstract: PURPOSE: An apparatus for correcting a vacuum gauge is provided to efficiently perform a correction process required for a long interval of time and reduce a time loss necessary for the correction process by simultaneously connecting a plurality of vacuum gauges to a vacuum chamber and by simultaneously performing a correction process on the plurality of vacuum gauges. CONSTITUTION: Vacuum is supplied to a vacuum chamber(100). A plurality of vacuum supplying pipes(112) are connected to the vacuum chamber. A plurality of vacuum connection pipes(118,120) connects the vacuum supplying pipes with the vacuum gauges to correct the plurality of vacuum gauges, connected to the plurality of vacuum supplying pipes, respectively. A data obtaining unit generates an electrical vacuum signal according to variation of the vacuum supplied to the vacuum chamber and obtains correction data for correcting the vacuum gauge according to the electrical vacuum signal, connected to the vacuum gauge connected to the vacuum connection pipe.

Abstract translation: 目的：提供一种用于校正真空计的装置，以有效执行长时间间隔所需的校正过程，并通过同时将多个真空计同时连接到真空室并同时执行以减少校正过程所需的时间损耗 对多个真空计的校正处理。 构成：将真空供应到真空室（100）。 多个真空供给管（112）连接到真空室。 多个真空连接管（118,120）将真空供给管与真空计连接，以分别连接多个真空供给管的多个真空计。 数据获取单元根据提供给真空室的真空度的变化产生电真空信号，并根据与真空连接管连接的真空计连接的电真空信号获得用于校正真空计的校正数据。

公开(公告)号：KR1020040059166A

公开(公告)日：2004-07-05

申请号：KR1020020085745

申请日：2002-12-28

Applicant: 삼성전자주식회사

Inventor： 윤종왕 ,  고영민 ,  김남용

IPC: H01L21/02

Abstract: PURPOSE: An apparatus for correcting a temperature/humidity converter is provided to connect a plurality of temperature and humidity converters to a digital temperature multi-meter and a digital humidity multi-meter by using a selection switch. CONSTITUTION: An apparatus for correcting a temperature/humidity converter includes a constant temperature and humidity chamber, a temperature detector, a humidity detector, and a multi-channel divider. The constant temperature and humidity chamber(210) is used for correcting a plurality of temperature and humidity converters. The temperature detector(220) and the humidity detector(230) are used for detecting the temperature and the humidity of the constant temperature and humidity chamber. The multi-channel divider(240) is used for connecting selectively the temperature and humidity converters to the temperature detector and the humidity detector.

Abstract translation: 目的：提供一种用于校正温度/湿度转换器的装置，通过使用选择开关将多个温度和湿度转换器连接到数字温度多表和数字湿度多表。 构成：用于校正温度/湿度转换器的装置包括恒温恒湿室，温度检测器，湿度检测器和多通道分压器。 恒温恒湿室（210）用于校正多个温湿度转换器。 温度检测器（220）和湿度检测器（230）用于检测恒温恒湿室的温度和湿度。 多通道分压器（240）用于将温湿度转换器选择性地连接到温度检测器和湿度检测器。