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公开(公告)号：KR20210031105A
公开(公告)日：2021-03-19
申请号：KR1020190112630A
申请日：2019-09-11
Applicant: 세메스 주식회사 , 성균관대학교산학협력단
CPC classification number: H01L21/6715 , G03F7/162 , G03F7/30 , C11D1/667 , C11D11/0047 , G03F7/0392 , G03F7/168 , G03F7/32 , G03F7/325 , G03F7/40 , G03F7/422 , G03F7/423 , H01L21/02307 , H01L21/304 , H01L21/67017 , H01L21/67225 , G03F7/039 , G03F7/322
Abstract: 본 발명은 기판 처리 장치 및 기판 처리 방법에 관한 것이다. 본 발명의 일 실시 예에 따른 기판 처리 장치는 현상액이 도포된 상태로 반입된 기판으로 유기 용매를 도포하는 제1공정 챔버; 상기 유기 용매가 도포된 상태로 반입된 상기 기판을 초임계 유체를 통해 처리 하는 제2공정 챔버를 포함한다.
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公开(公告)号：KR101744231B1
公开(公告)日：2017-06-20
申请号：KR1020150113682
申请日：2015-08-12
Applicant: 성균관대학교산학협력단 , 숭실대학교산학협력단
Abstract: 그래핀-유기반도체수직형트랜지스터, 및상기그래핀-유기반도체수직형트랜지스터의제조방법에관한것이다.
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公开(公告)号：KR1020170019626A
公开(公告)日：2017-02-22
申请号：KR1020150113682
申请日：2015-08-12
Applicant: 성균관대학교산학협력단 , 숭실대학교산학협력단
Abstract: 그래핀-유기반도체수직형트랜지스터, 및상기그래핀-유기반도체수직형트랜지스터의제조방법에관한것이다.
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公开(公告)号：KR1020120034349A
公开(公告)日：2012-04-12
申请号：KR1020100095834
申请日：2010-10-01
Applicant: 성균관대학교산학협력단 , 숭실대학교산학협력단
IPC: H01L29/786 , H01L21/336
CPC classification number: H01L29/0669 , H01L29/16 , H01L29/4908 , H01L51/0045
Abstract: PURPOSE: A flexible field effect transistor and a manufacturing method thereof are provided to manufacture low voltage operation graphene FET(Field Effect Transistor) array on a plastic substrate by using ionic gel for a gate insulator. CONSTITUTION: A semiconductor layer includes a carbon nano-structure which is arranged to form a channel region between a source electrode and a drain electrode. The carbon nano structure includes graphene. The graphene is formed on a metal catalytic layer by chemical vapor deposition. An ionic gel layer is formed between the semiconductor layer and the gate electrode including the carbon nano-structure. The ionic gel layer forms an insulator layer between the channel region and the gate electrode.
Abstract translation: 目的：提供一种灵活的场效应晶体管及其制造方法，通过使用离子凝胶作为栅极绝缘体，在塑料基板上制造低压操作石墨烯FET（场效应晶体管）阵列。 构成：半导体层包括碳纳米结构，其被布置成在源极和漏极之间形成沟道区。 碳纳米结构包括石墨烯。 通过化学气相沉积在金属催化剂层上形成石墨烯。 在半导体层和包括碳纳米结构的栅电极之间形成离子凝胶层。 离子凝胶层在沟道区和栅电极之间形成绝缘体层。
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公开(公告)号：KR1020130110883A
公开(公告)日：2013-10-10
申请号：KR1020120033192
申请日：2012-03-30
Applicant: 숭실대학교산학협력단
CPC classification number: D01D5/003 , B01D39/1623 , D01D1/02 , D01F8/14
Abstract: PURPOSE: A super water-repellent nano fiber and a manufacturing method of the same are provided to electro-spin by mixing inorganic silsesquiazane and incompatible organic polymer. CONSTITUTION: A manufacturing method of a super water-repellent nano fiber comprises the following steps. Polysilsesquiazane is manufactured by using a radical reaction. The polysilsesquiazane and incompatible organic polymer are mixed with an organic solvent. The solution is elctro-spun to make a nano fiber. The radical reaction is carried out by inserting monomer ammonia gas expressed in chemical formula 1.
Abstract translation: 目的：通过混合无机硅倍半醌和不相容的有机聚合物，提供超疏水纳米纤维及其制造方法进行电纺。 构成：超疏水性纳米纤维的制造方法包括以下步骤。 聚硅杂四环是通过使用自由基反应制造的。 将聚二叠氮和不相容的有机聚合物与有机溶剂混合。 将该溶液旋压成纳米纤维。 自由基反应是通过插入以化学式1表示的单体氨气进行的。
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Patent Agency Ranking
公开(公告)号：KR1020130028995A
公开(公告)日：2013-03-21
申请号：KR1020110034170
申请日：2011-04-13
Applicant: 숭실대학교산학협력단
CPC classification number: C03C21/00 , C03C17/32 , C03C23/0095 , C03C2217/70
Abstract: PURPOSE: A smart window with reversible surface morphology is provided to ensure selective definition. CONSTITUTION: A smart window with reversible surface morphology contains a coating layer and counterions. The coating layer contains ionic electrolyte polymers and silane group-containing polymers. The ionic electrolyte polymers contain cationic electrolyte polymers, anionic electrolyte polymers, or a combination thereof. A method for manufacturing the smart window comprises: a step of forming the coating layer on a substrate; and a step of performing ion exchange reaction of the ionic electrolyte polymers and counterions.
Abstract translation: 目的：提供具有可逆表面形态的智能窗口，以确保选择性定义。 构成：具有可逆表面形态的智能窗口包含涂层和抗衡离子。 涂层含有离子电解质聚合物和含硅烷基的聚合物。 离子电解质聚合物含有阳离子电解质聚合物，阴离子电解质聚合物或其组合。 一种用于制造智能窗的方法包括：在衬底上形成涂层的步骤; 以及进行离子电解质聚合物和抗衡离子的离子交换反应的工序。
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公开(公告)号：KR101200796B1
公开(公告)日：2012-11-13
申请号：KR1020100106795
申请日：2010-10-29
Applicant: 숭실대학교산학협력단
IPC: H01L29/786 , H01L21/336
Abstract: 본 발명은 유전체 표면을 개질하여 고효율의 전계효과 트랜지스터를 제조한는 방법에 관한 것으로서, 구체적으로는 유전체 표면에 하이드록시로 말단이 기능화된 폴리머 브러쉬를 그래프팅하여 표면을 개질하여, 고성능의 안정한 전계효과 트랜지스터를 제조하는 방법에 관한 것이다. 본 발명은 산화 기판 위에 하이드록시기를 갖는 고분자를 스핀 코팅하여 고분자 브러쉬를 형성하는 단계; 고분자 브러쉬가 형성된 기판을 가열 및 세정하는 단계; 및 유기반도체 필름을 상기 기판 위에 스핀 코팅하는 단계를 포함하는 전계효과 트랜지스터 제조방법을 제공한다.
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公开(公告)号：KR1020120045328A
公开(公告)日：2012-05-09
申请号：KR1020100106795
申请日：2010-10-29
Applicant: 숭실대학교산학협력단
IPC: H01L29/786 , H01L21/336
CPC classification number: H01L51/0003 , H01L51/0529 , H01L51/0558
Abstract: PURPOSE: A transistor manufacturing method for a stable solution process which has high efficiency is provided to improve performance of a field effect transistor by easily reforming a dielectric surface using polymers. CONSTITUTION: A polymer brush is formed by spin-coating a polymer which has a hydroxyl group on an oxide substrate. The substrate in which the polymer brush is formed is heated and washed. An organic semiconductor film is spin-coated on the substrate. The polymer brush is comprised of the polymer which has the hydroxyl group.
Abstract translation: 目的：提供高效率的稳定溶液工艺的晶体管制造方法，通过使用聚合物容易地重整电介质表面来提高场效应晶体管的性能。 构成：通过旋涂在氧化物基底上具有羟基的聚合物形成聚合物刷。 将形成有聚合物刷的基材加热洗涤。 将有机半导体膜旋涂在基板上。 聚合物刷由具有羟基的聚合物组成。
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公开(公告)号：KR1020130099377A
公开(公告)日：2013-09-06
申请号：KR1020120020839
申请日：2012-02-29
Applicant: 숭실대학교산학협력단
Abstract: PURPOSE: A manufacturing method of a near infrared ray hybrid film is provided to manufacture a near infrared ray hybrid film having excellent stability regardless of change in external environmental factors, such as ultraviolet (UV) rays, high temperatures, and high humidity, in a short period of time by UV irradiation. CONSTITUTION: A manufacturing method of a near infrared ray hybrid film comprises the steps of: (i) adding a diimonium compound represented by chemical formula 1 as a near infrared ray absorbing pigment and a transparent material polymer into an organic solvent to prepare a mixture; (ii) coating the mixture on a glass or transparent film to prepare a hybrid film; and performing cross-linking on the hybrid film by applying UV rays of 190 to 400 nm for 1 to 10 minutes. The diimonium compound represented by chemical formula 1 and the transparent material polymer are mixed at a weight ratio of 1:1 to 1:5.
Abstract translation: 目的：提供一种近红外线复合膜的制造方法，其制造与紫外（UV）射线，高温，高湿度等外部环境因素变化无关的稳定性优异的近红外线混合膜， 短时间内通过紫外线照射。 构成：近红外线混合膜的制造方法包括以下步骤：（i）将由化学式1表示的二亚铵化合物作为近红外线吸收颜料和透明材料聚合物添加到有机溶剂中以制备混合物; （ii）将混合物涂布在玻璃或透明膜上以制备混合膜; 并通过施加190〜400nm的紫外线进行1〜10分钟，对混合薄膜进行交联。 由化学式1表示的二亚铵化合物和透明材料聚合物以1:1至1:5的重量比混合。
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公开(公告)号：KR101374246B1
公开(公告)日：2014-03-13
申请号：KR1020120033192
申请日：2012-03-30
Applicant: 숭실대학교산학협력단
Abstract: 본 발명은 환경 변화에 대한 안정성이 우수한 초발수성 나노섬유 및 그의 제조 방법에 관한 것이다. 본 발명에 따른 초발수성 나노섬유는 무기물의 전구체인 실세스퀴아잔(silsesquiazane)과 비혼화성 유기 고분자를 혼합하여 전기방사를 함으로써, 환경변화에 높은 안정성을 나타낸다.
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