公开(公告)号：KR1020030034611A

公开(公告)日：2003-05-09

申请号：KR1020010066263

申请日：2001-10-26

Applicant: 한국과학기술연구원

Inventor： 문성욱 ,  채경수 ,  강호관

IPC: G02B26/08

Abstract: PURPOSE: A packaging of an optical switching device is provided to secure a stable operation without influence from the external environment when the optical switching device is packaged. CONSTITUTION: A packaging of an optical switching device includes a lower substrate(10) provided with a driving member(20) for driving the mirror surface of the reflection plate, an upper substrate(50) formed thereon a polymer pattern(40) provided with an insertion path of an optical fiber(60) and provided with a structure(30) at both inner sides of the polymer pattern(40) and an upper substrate(50) coupled to the top surface of the lower substrate(10), wherein the optical fiber(60) is inserted into the insertion path of the optical fiber(60).

Abstract translation: 目的：提供一种光开关装置的封装，以确保稳定的操作，而不会在外部环境的影响下，当光开关器件被封装时。 构成：光开关装置的封装包括设置有用于驱动反射板的镜面的驱动构件（20）的下基板（10），形成有聚合物图案（40）的上基板（50） 光纤（60）的插入路径，并且在聚合物图案（40）的两个内侧处设置有结构（30）和耦合到下基板（10）的顶表面的上基板（50），其中 光纤（60）插入到光纤（60）的插入路径中。

公开(公告)号：KR1020030034610A

公开(公告)日：2003-05-09

申请号：KR1020010066262

申请日：2001-10-26

Applicant: 한국과학기술연구원

Inventor： 문성욱 ,  채경수 ,  정대석 ,  강호관

IPC: G02B26/08

Abstract: PURPOSE: A micro optical switch is provided, which is applied to an optical switch with a simple structure made of an upper electrode and a lower electrode. CONSTITUTION: A micro optical switch includes a semiconductor substrate(10), an insulation layer(20) and a lower electrode(30) formed on the semiconductor substrate(10) successively, an upper electrode(40) having a predetermined length coupled to the one side of the upper surface of the insulation layer(20), a mirror surface(60) and a coated connection member(50) in such a way that a portion of the coated connection member(50) is connected to the ground surface of the mirror surface(60) at a portion of the upper electrode(40) not coupled to the insulation layer(20).

Abstract translation: 目的：提供一种微型光开关，其应用于具有由上电极和下电极构成的简单结构的光开关。 构成：微型光开关包括依次形成在半导体衬底（10）上的半导体衬底（10），绝缘层（20）和下电极（30），具有预定长度的上电极（40） 绝缘层（20）的上表面的一侧，镜面（60）和涂覆的连接构件（50），使得涂覆的连接构件（50）的一部分连接到 在上电极（40）的未连接到绝缘层（20）的部分处的镜面（60）。

公开(公告)号：KR1020030034609A

公开(公告)日：2003-05-09

申请号：KR1020010066261

申请日：2001-10-26

Applicant: 한국과학기술연구원

Inventor： 문성욱 ,  채경수 ,  강호관

IPC: B81B7/00

CPC classification number: B81B3/0021 ,  B81B2201/03 ,  B81B2203/04 ,  B81B2203/05

Abstract: PURPOSE: A large displacement operating type actuator is provided to obtain a large displacement by arranging the actuator to operate at the region having a sub micro spacing. CONSTITUTION: A large displacement operating type actuator comprises a fixed electrode(100) for generating displacement at a fixed state; a movable electrode(200) protruded from the front end of a supporting beam(210) and coupled to the fixed electrode so as to generate displacement when the actuator is in operation; and a sub micro gap(400) formed between the electrodes in the portion where the supporting beam of the movable electrode is coupled, when the fixed electrode and the movable electrode are coupled with each other and operate.

Abstract translation: 目的：提供大排量操作型致动器，通过将致动器布置在具有亚微间距的区域上来获得大的位移。 构成：大排量操作型致动器包括用于在固定状态下产生位移的固定电极（100） 从所述支撑梁（210）的前端突出并联接到所述固定电极的可动电极（200），以在所述致动器运行时产生位移; 以及当固定电极和可动电极彼此耦合并且操作时，在可动电极的支撑梁的部分中的电极之间形成的子微间隙（400）。

公开(公告)号：KR1020030034607A

公开(公告)日：2003-05-09

申请号：KR1020010066259

申请日：2001-10-26

Applicant: 한국과학기술연구원

Inventor： 문성욱 ,  채경수 ,  권영아 ,  강호관

IPC: G02B26/08

Abstract: PURPOSE: An optical switch capable of removing an offset is provided to remove the tube loss due to the offset generated by the thickness of mirror surface when the optical switch is operated, thereby increasing the reliability and efficiency of the transmission data in the application of optical communication. CONSTITUTION: An optical switch capable of removing an offset includes a reflection plate(200) for changing an optical path to an output terminal by reflecting an input light beam(100) inputted from an input terminal installed at a reflection surface in an arbitrary direction to minimize the offset, a driving device(220) for generating a driving force to move by deforming the position of the reflection plate(200) to an arbitrary direction and an anchor(260) provided with a supporting beam(240) for supporting the reflection plate(200) and the structure of the driving device(220) to the ground.

Abstract translation: 目的：提供一种能够去除偏移的光学开关，以消除由光学开关操作时镜面厚度产生的偏移造成的管损失，从而提高光学应用中传输数据的可靠性和效率 通讯。 构成：能够去除偏移的光学开关包括反射板（200），用于通过将从安装在任意方向上的反射表面的输入端子输入的输入光束（100）反射到向任意方向反射的输入光束（100）而将光路改变为输出端子， 使偏移最小化的驱动装置（220），用于通过使反射板（200）的位置变形到任意方向而产生移动的驱动力的驱动装置（220）和设置有用于支撑反射的支撑梁（240）的锚固件（260） 板（200）和驱动装置（220）的结构到地面。

公开(公告)号：KR100485592B1

公开(公告)日：2005-04-27

申请号：KR1020010066261

申请日：2001-10-26

Applicant: 한국과학기술연구원

Inventor： 문성욱 ,  채경수 ,  강호관

IPC: B81B7/00

Abstract: 본 발명은 대변위 작동형 구동기에 관한 것이다. 보다 상세하게는 구동기의 양 전극간 간격을 최소한의 선폭을 갖도록 줄임으로서 서브 마이크로 간격이 형성된 영역에서 변위를 최대한으로 증대시킬 수 있는 기술에 관한 것이다.
본 발명은 대변위 작동형 구동기에 있어서, 고정된 상태에서 자세를 유지하여 변위를 발생시키는 고정전극(100)과; 가동전극 구동빔(210)이 선단에 돌출되어 형성되며, 구동기가 구동될 때 상기 고정전극(100) 방향으로 근접하여 변위를 발생시키는 지지빔(200)을 구비하며; 상기 고정전극(100)과 가동전극 구동빔(210)이 결합될 때, 상기 가동전극 구동빔(210)의 지지빔(200)이 결합된 부위의 전극간 초기에는 공정 가능한 최소 선폭 만큼의 전극 간격(300)을 유지하여 최소한의 구동력을 얻으며, 동작시에는 고정전극(100)과 가동전극 구동빔(210) 간의 간격이 적어도 1㎛ 이하의 서브마이크로 간격(400)을 갖도록 유지하여 대변위의 구동력을 발생시키는 것을 특징으로 하는 대변위 작동형 구동기가 제시된다.
따라서, 본 발명은 대변위 작동형 구동기를 구현함으로서 전기도금 공정을 이용하여 고 형상비를 갖는 구조물을 제작할 경우 광스위치, 광 셔터(shutter), xy 스테이지 등에 적용할 수 있다.

公开(公告)号：KR100402990B1

公开(公告)日：2003-10-23

申请号：KR1020010066260

申请日：2001-10-26

Applicant: 한국과학기술연구원

Inventor： 문성욱 ,  채경수 ,  김종용 ,  강호관

IPC: G02B26/00

Abstract: PURPOSE: A method for manufacturing an optical switch by using an ultraviolet rays LIGA technique is provided to prevent the generation of crack due to the relatively small residual stress by utilizing a polymer as a photo resist material during the manufacture of the optical switch, thereby improving the adhesion to the ground layer. CONSTITUTION: A method for manufacturing an optical switch by using an ultraviolet rays LIGA technique includes the steps of: forming an oxidation layer(20) on a semiconductor substrate(10) to a predetermined thickness, forming a polymer thick layer(30) on the oxidation layer(20) formed on the semiconductor substrate(10) by using the polymer as the photo resist material, removing a solvent resided at the formed polymer thick layer(30) by a soft baking, initializing so as to combine of a material consisting of the polymer thick layer(30) by implementing a photolithography on a negative type mask after the soft baking, accelerating the combination of the material of the initialized polymer thick layer by a post baking after the process of the photolithography, developing so as to pattern a specific region of the polymer thick layer(30) to a predetermined thickness after the post baking, depositing an electroplating material on the patterned region of the polymer thick layer(30) and etching the resided photo resist material by using a conventional removing material after the deposition of the electroplating material.

Abstract translation: 目的：提供一种通过使用紫外线LIGA技术制造光学开关的方法，以防止在制造光学开关期间利用聚合物作为光致抗蚀剂材料而由于相对较小的残余应力而产生裂纹，由此改善 对地面层的附着力。 本发明提供了一种利用紫外线LIGA技术制造光开关的方法，该方法包括以下步骤：在半导体衬底（10）上形成预定厚度的氧化层（20），在该半导体衬底（10）上形成聚合物厚层（30） 通过使用聚合物作为光致抗蚀剂材料在半导体基板（10）上形成氧化层（20），通过软烘烤除去驻留在形成的聚合物厚层（30）处的溶剂，初始化以组合由 通过在软烘烤之后在负型掩模上实施光刻，在光刻工艺之后通过后烘焙加速已初始化的聚合物厚层的材料的组合，进行显影以形成图案，从而形成聚合物厚层（30） 在后烘烤之后将聚合物厚层（30）的特定区域固定到预定厚度，在聚合物厚层（30）的图案化区域上沉积电镀材料， 在沉积电镀材料之后通过使用常规去除材料来沉积驻留的光致抗蚀剂材料。

公开(公告)号：KR100402991B1

公开(公告)日：2003-10-23

申请号：KR1020010066262

申请日：2001-10-26

Applicant: 한국과학기술연구원

Inventor： 문성욱 ,  채경수 ,  정대석 ,  강호관

IPC: G02B26/08

Abstract: PURPOSE: A micro optical switch is provided, which is applied to an optical switch with a simple structure made of an upper electrode and a lower electrode. CONSTITUTION: A micro optical switch includes a semiconductor substrate(10), an insulation layer(20) and a lower electrode(30) formed on the semiconductor substrate(10) successively, an upper electrode(40) having a predetermined length coupled to the one side of the upper surface of the insulation layer(20), a mirror surface(60) and a coated connection member(50) in such a way that a portion of the coated connection member(50) is connected to the ground surface of the mirror surface(60) at a portion of the upper electrode(40) not coupled to the insulation layer(20).

Abstract translation: 目的：提供一种微型光学开关，其应用于具有由上电极和下电极构成的简单结构的光开关。 本发明提供了一种微型光开关，包括：半导体衬底（10），在半导体衬底（10）上依次形成的绝缘层（20）和下电极（30），具有预定长度的上电极（40） （50）的一部分连接到绝缘层（20）的上表面的一侧，镜面（60）和涂覆的连接构件（50），以使得涂覆的连接构件 在上电极（40）的未与绝缘层（20）耦合的部分处的镜面（60）。

公开(公告)号：KR100402992B1

公开(公告)日：2003-10-23

申请号：KR1020010066263

申请日：2001-10-26

Applicant: 한국과학기술연구원

Inventor： 문성욱 ,  채경수 ,  강호관

IPC: G02B26/08

Abstract: PURPOSE: A packaging of an optical switching device is provided to secure a stable operation without influence from the external environment when the optical switching device is packaged. CONSTITUTION: A packaging of an optical switching device includes a lower substrate(10) provided with a driving member(20) for driving the mirror surface of the reflection plate, an upper substrate(50) formed thereon a polymer pattern(40) provided with an insertion path of an optical fiber(60) and provided with a structure(30) at both inner sides of the polymer pattern(40) and an upper substrate(50) coupled to the top surface of the lower substrate(10), wherein the optical fiber(60) is inserted into the insertion path of the optical fiber(60).

Abstract translation: 目的：提供光开关器件的封装，以确保在光开关器件封装时不受外部环境影响的稳定操作。 本发明的目的在于提供一种光开关装置的组装体，其包括：设置有驱动反射板的镜面的驱动部件（20）的下部基板（10）;形成有聚合物图案（40）的上部基板（50） 光纤（60）的插入路径并且在所述聚合物图案（40）的两个内侧处设置有结构（30），并且所述上基板（50）联接到所述下基板（10）的顶表面，其中， 将光纤（60）插入光纤（60）的插入路径中。

公开(公告)号：KR1020030034608A

公开(公告)日：2003-05-09

申请号：KR1020010066260

申请日：2001-10-26

Applicant: 한국과학기술연구원

Inventor： 문성욱 ,  채경수 ,  김종용 ,  강호관

IPC: G02B26/00

Abstract: PURPOSE: A method for manufacturing an optical switch by using an ultraviolet rays LIGA technique is provided to prevent the generation of crack due to the relatively small residual stress by utilizing a polymer as a photo resist material during the manufacture of the optical switch, thereby improving the adhesion to the ground layer. CONSTITUTION: A method for manufacturing an optical switch by using an ultraviolet rays LIGA technique includes the steps of: forming an oxidation layer(20) on a semiconductor substrate(10) to a predetermined thickness, forming a polymer thick layer(30) on the oxidation layer(20) formed on the semiconductor substrate(10) by using the polymer as the photo resist material, removing a solvent resided at the formed polymer thick layer(30) by a soft baking, initializing so as to combine of a material consisting of the polymer thick layer(30) by implementing a photolithography on a negative type mask after the soft baking, accelerating the combination of the material of the initialized polymer thick layer by a post baking after the process of the photolithography, developing so as to pattern a specific region of the polymer thick layer(30) to a predetermined thickness after the post baking, depositing an electroplating material on the patterned region of the polymer thick layer(30) and etching the resided photo resist material by using a conventional removing material after the deposition of the electroplating material.

Abstract translation: 目的：提供一种使用紫外线LIGA技术制造光开关的方法，以防止在光开关制造期间利用聚合物作为光致抗蚀剂材料，由于残留应力相对较小而产生裂纹，从而改善 对地层的粘附。 构成：通过使用紫外线LIGA技术制造光开关的方法包括以下步骤：在半导体衬底（10）上形成预定厚度的氧化层（20），在其上形成聚合物厚层（30） 通过使用聚合物作为光致抗蚀剂材料形成在半导体衬底（10）上的氧化层（20），通过软烘烤除去形成在聚合物厚层（30）上的溶剂，进行初始化，以组合 通过在软烘烤之后在负型掩模上实施光刻法，在光刻之后通过后烘烤加速初始化的聚合物厚层的材料的组合，以形成图案 聚合物厚层（30）的特定区域在后烘烤后达到预定厚度，在聚合物厚层（30）的图案化区域上沉积电镀材料和etchi 在沉积电镀材料之后，使用常规的去除材料来涂覆驻留的光致抗蚀剂材料。