公开(公告)号：KR100402992B1

公开(公告)日：2003-10-23

申请号：KR1020010066263

申请日：2001-10-26

Applicant: 한국과학기술연구원

Inventor： 문성욱 ,  채경수 ,  강호관

IPC: G02B26/08

Abstract: PURPOSE: A packaging of an optical switching device is provided to secure a stable operation without influence from the external environment when the optical switching device is packaged. CONSTITUTION: A packaging of an optical switching device includes a lower substrate(10) provided with a driving member(20) for driving the mirror surface of the reflection plate, an upper substrate(50) formed thereon a polymer pattern(40) provided with an insertion path of an optical fiber(60) and provided with a structure(30) at both inner sides of the polymer pattern(40) and an upper substrate(50) coupled to the top surface of the lower substrate(10), wherein the optical fiber(60) is inserted into the insertion path of the optical fiber(60).

Abstract translation: 目的：提供光开关器件的封装，以确保在光开关器件封装时不受外部环境影响的稳定操作。 本发明的目的在于提供一种光开关装置的组装体，其包括：设置有驱动反射板的镜面的驱动部件（20）的下部基板（10）;形成有聚合物图案（40）的上部基板（50） 光纤（60）的插入路径并且在所述聚合物图案（40）的两个内侧处设置有结构（30），并且所述上基板（50）联接到所述下基板（10）的顶表面，其中， 将光纤（60）插入光纤（60）的插入路径中。

公开(公告)号：KR100402991B1

公开(公告)日：2003-10-23

申请号：KR1020010066262

申请日：2001-10-26

Applicant: 한국과학기술연구원

Inventor： 문성욱 ,  채경수 ,  정대석 ,  강호관

IPC: G02B26/08

Abstract: PURPOSE: A micro optical switch is provided, which is applied to an optical switch with a simple structure made of an upper electrode and a lower electrode. CONSTITUTION: A micro optical switch includes a semiconductor substrate(10), an insulation layer(20) and a lower electrode(30) formed on the semiconductor substrate(10) successively, an upper electrode(40) having a predetermined length coupled to the one side of the upper surface of the insulation layer(20), a mirror surface(60) and a coated connection member(50) in such a way that a portion of the coated connection member(50) is connected to the ground surface of the mirror surface(60) at a portion of the upper electrode(40) not coupled to the insulation layer(20).

Abstract translation: 目的：提供一种微型光学开关，其应用于具有由上电极和下电极构成的简单结构的光开关。 本发明提供了一种微型光开关，包括：半导体衬底（10），在半导体衬底（10）上依次形成的绝缘层（20）和下电极（30），具有预定长度的上电极（40） （50）的一部分连接到绝缘层（20）的上表面的一侧，镜面（60）和涂覆的连接构件（50），以使得涂覆的连接构件 在上电极（40）的未与绝缘层（20）耦合的部分处的镜面（60）。

公开(公告)号：KR1020030034608A

公开(公告)日：2003-05-09

申请号：KR1020010066260

申请日：2001-10-26

Applicant: 한국과학기술연구원

Inventor： 문성욱 ,  채경수 ,  김종용 ,  강호관

IPC: G02B26/00

Abstract: PURPOSE: A method for manufacturing an optical switch by using an ultraviolet rays LIGA technique is provided to prevent the generation of crack due to the relatively small residual stress by utilizing a polymer as a photo resist material during the manufacture of the optical switch, thereby improving the adhesion to the ground layer. CONSTITUTION: A method for manufacturing an optical switch by using an ultraviolet rays LIGA technique includes the steps of: forming an oxidation layer(20) on a semiconductor substrate(10) to a predetermined thickness, forming a polymer thick layer(30) on the oxidation layer(20) formed on the semiconductor substrate(10) by using the polymer as the photo resist material, removing a solvent resided at the formed polymer thick layer(30) by a soft baking, initializing so as to combine of a material consisting of the polymer thick layer(30) by implementing a photolithography on a negative type mask after the soft baking, accelerating the combination of the material of the initialized polymer thick layer by a post baking after the process of the photolithography, developing so as to pattern a specific region of the polymer thick layer(30) to a predetermined thickness after the post baking, depositing an electroplating material on the patterned region of the polymer thick layer(30) and etching the resided photo resist material by using a conventional removing material after the deposition of the electroplating material.

Abstract translation: 目的：提供一种使用紫外线LIGA技术制造光开关的方法，以防止在光开关制造期间利用聚合物作为光致抗蚀剂材料，由于残留应力相对较小而产生裂纹，从而改善 对地层的粘附。 构成：通过使用紫外线LIGA技术制造光开关的方法包括以下步骤：在半导体衬底（10）上形成预定厚度的氧化层（20），在其上形成聚合物厚层（30） 通过使用聚合物作为光致抗蚀剂材料形成在半导体衬底（10）上的氧化层（20），通过软烘烤除去形成在聚合物厚层（30）上的溶剂，进行初始化，以组合 通过在软烘烤之后在负型掩模上实施光刻法，在光刻之后通过后烘烤加速初始化的聚合物厚层的材料的组合，以形成图案 聚合物厚层（30）的特定区域在后烘烤后达到预定厚度，在聚合物厚层（30）的图案化区域上沉积电镀材料和etchi 在沉积电镀材料之后，使用常规的去除材料来涂覆驻留的光致抗蚀剂材料。

公开(公告)号：KR100332996B1

公开(公告)日：2002-04-15

申请号：KR1020000023922

申请日：2000-05-04

Applicant: 한국과학기술연구원

Inventor： 문성욱 ,  채경수

IPC: G02B26/08

Abstract: 본 발명은 광스위칭장치에 관한 것으로서, 특히, 입력광을 반사시켜 광로를 변화시키는 반사미러; 입력신호에 의해 정전인력을 발생하여 기설정된 위치로 스위칭하도록 상기 반사미러를 구동시키고, 상기 반사미러의 변위에 대응하여 정전용량을 변화시키는 구동수단; 상기 구동수단으로부터 정전용량의 변화량을 검출하는 정전용량 검출수단; 및 상기 정전용량 검출수단의 출력신호에 기초하여 상기 반사미러의 스위칭 위치를 판별하여 기설정 위치와 일치하지 않을 시 상기 반사미러의 위치를 보정하도록 상기 구동수단을 제어하는 제어수단을 구비하는 것을 특징으로 한다.
따라서, 본 발명에서는 제어 가능한 초소형 기계적 구조물을 이용하여 반사미러의 변위에 따른 정전용량의 변화량을 검출하여 반사미러의 스위칭 위치를 제어하는 피드백 회로를 구현함으로써, 반사미러의 정밀한 위치 제어가 가능하게 하며, 이로 인해 복수의 광로를 선택할 수 있는 선택성이 개선됨과 아울러 광손실이 줄어드는 효과가 있다.

公开(公告)号：KR1020040057322A

公开(公告)日：2004-07-02

申请号：KR1020020084010

申请日：2002-12-26

Applicant: 한국과학기술연구원

Inventor： 문성욱 ,  신현준 ,  채경수

IPC: G02B26/02

Abstract: PURPOSE: A micro-optical attenuator using a dual mirror structure is provided to perform an active function and reduce the loss of the light by controlling the intensity of the light according to a driving voltage. CONSTITUTION: A micro-optical attenuator using a dual mirror structure includes a plurality of mirrors, a plurality of drivers, a plurality of driving electrodes, and a plurality of optical fiber fixing devices. The mirrors(300) are used for controlling the intensity of the incident light. The mirrors are moved to the opposite directions, respectively. The drivers(500) are connected to the mirrors in order to move the mirrors. The driving electrodes(100) are used for applying the voltage to the drivers in order to move the mirrors. The optical fiber fixing devices(200,400) are used for fixing optical fibers.

Abstract translation: 目的：提供使用双镜结构的微光衰减器，以通过根据驱动电压控制光的强度来执行有功功能并减少光的损失。 构成：使用双镜结构的微光衰减器包括多个反射镜，多个驱动器，多个驱动电极和多个光纤固定装置。 反射镜（300）用于控制入射光的强度。 镜子分别移动到相反的方向。 驱动器（500）连接到镜子以移动镜子。 驱动电极（100）用于向驱动器施加电压以移动反射镜。 光纤固定装置（200,400）用于固定光纤。

公开(公告)号：KR1020030034611A

公开(公告)日：2003-05-09

申请号：KR1020010066263

申请日：2001-10-26

Applicant: 한국과학기술연구원

Inventor： 문성욱 ,  채경수 ,  강호관

IPC: G02B26/08

Abstract: PURPOSE: A packaging of an optical switching device is provided to secure a stable operation without influence from the external environment when the optical switching device is packaged. CONSTITUTION: A packaging of an optical switching device includes a lower substrate(10) provided with a driving member(20) for driving the mirror surface of the reflection plate, an upper substrate(50) formed thereon a polymer pattern(40) provided with an insertion path of an optical fiber(60) and provided with a structure(30) at both inner sides of the polymer pattern(40) and an upper substrate(50) coupled to the top surface of the lower substrate(10), wherein the optical fiber(60) is inserted into the insertion path of the optical fiber(60).

Abstract translation: 目的：提供一种光开关装置的封装，以确保稳定的操作，而不会在外部环境的影响下，当光开关器件被封装时。 构成：光开关装置的封装包括设置有用于驱动反射板的镜面的驱动构件（20）的下基板（10），形成有聚合物图案（40）的上基板（50） 光纤（60）的插入路径，并且在聚合物图案（40）的两个内侧处设置有结构（30）和耦合到下基板（10）的顶表面的上基板（50），其中 光纤（60）插入到光纤（60）的插入路径中。

公开(公告)号：KR1020030034610A

公开(公告)日：2003-05-09

申请号：KR1020010066262

申请日：2001-10-26

Applicant: 한국과학기술연구원

Inventor： 문성욱 ,  채경수 ,  정대석 ,  강호관

IPC: G02B26/08

Abstract: PURPOSE: A micro optical switch is provided, which is applied to an optical switch with a simple structure made of an upper electrode and a lower electrode. CONSTITUTION: A micro optical switch includes a semiconductor substrate(10), an insulation layer(20) and a lower electrode(30) formed on the semiconductor substrate(10) successively, an upper electrode(40) having a predetermined length coupled to the one side of the upper surface of the insulation layer(20), a mirror surface(60) and a coated connection member(50) in such a way that a portion of the coated connection member(50) is connected to the ground surface of the mirror surface(60) at a portion of the upper electrode(40) not coupled to the insulation layer(20).

Abstract translation: 目的：提供一种微型光开关，其应用于具有由上电极和下电极构成的简单结构的光开关。 构成：微型光开关包括依次形成在半导体衬底（10）上的半导体衬底（10），绝缘层（20）和下电极（30），具有预定长度的上电极（40） 绝缘层（20）的上表面的一侧，镜面（60）和涂覆的连接构件（50），使得涂覆的连接构件（50）的一部分连接到 在上电极（40）的未连接到绝缘层（20）的部分处的镜面（60）。

公开(公告)号：KR1020030034609A

公开(公告)日：2003-05-09

申请号：KR1020010066261

申请日：2001-10-26

Applicant: 한국과학기술연구원

Inventor： 문성욱 ,  채경수 ,  강호관

IPC: B81B7/00

CPC classification number: B81B3/0021 ,  B81B2201/03 ,  B81B2203/04 ,  B81B2203/05

Abstract: PURPOSE: A large displacement operating type actuator is provided to obtain a large displacement by arranging the actuator to operate at the region having a sub micro spacing. CONSTITUTION: A large displacement operating type actuator comprises a fixed electrode(100) for generating displacement at a fixed state; a movable electrode(200) protruded from the front end of a supporting beam(210) and coupled to the fixed electrode so as to generate displacement when the actuator is in operation; and a sub micro gap(400) formed between the electrodes in the portion where the supporting beam of the movable electrode is coupled, when the fixed electrode and the movable electrode are coupled with each other and operate.

Abstract translation: 目的：提供大排量操作型致动器，通过将致动器布置在具有亚微间距的区域上来获得大的位移。 构成：大排量操作型致动器包括用于在固定状态下产生位移的固定电极（100） 从所述支撑梁（210）的前端突出并联接到所述固定电极的可动电极（200），以在所述致动器运行时产生位移; 以及当固定电极和可动电极彼此耦合并且操作时，在可动电极的支撑梁的部分中的电极之间形成的子微间隙（400）。

公开(公告)号：KR1020030034607A

公开(公告)日：2003-05-09

申请号：KR1020010066259

申请日：2001-10-26

Applicant: 한국과학기술연구원

Inventor： 문성욱 ,  채경수 ,  권영아 ,  강호관

IPC: G02B26/08

Abstract: PURPOSE: An optical switch capable of removing an offset is provided to remove the tube loss due to the offset generated by the thickness of mirror surface when the optical switch is operated, thereby increasing the reliability and efficiency of the transmission data in the application of optical communication. CONSTITUTION: An optical switch capable of removing an offset includes a reflection plate(200) for changing an optical path to an output terminal by reflecting an input light beam(100) inputted from an input terminal installed at a reflection surface in an arbitrary direction to minimize the offset, a driving device(220) for generating a driving force to move by deforming the position of the reflection plate(200) to an arbitrary direction and an anchor(260) provided with a supporting beam(240) for supporting the reflection plate(200) and the structure of the driving device(220) to the ground.

Abstract translation: 目的：提供一种能够去除偏移的光学开关，以消除由光学开关操作时镜面厚度产生的偏移造成的管损失，从而提高光学应用中传输数据的可靠性和效率 通讯。 构成：能够去除偏移的光学开关包括反射板（200），用于通过将从安装在任意方向上的反射表面的输入端子输入的输入光束（100）反射到向任意方向反射的输入光束（100）而将光路改变为输出端子， 使偏移最小化的驱动装置（220），用于通过使反射板（200）的位置变形到任意方向而产生移动的驱动力的驱动装置（220）和设置有用于支撑反射的支撑梁（240）的锚固件（260） 板（200）和驱动装置（220）的结构到地面。

公开(公告)号：KR100343815B1

公开(公告)日：2002-07-20

申请号：KR1020000045113

申请日：2000-08-03

Applicant: 한국과학기술연구원

Inventor： 문성욱 ,  채경수

IPC: G02B26/08

Abstract: 본 발명은 옵셋(offset) 보정이 가능한 광스위치 소자에 관한 것이다. 특히, 초소형 기계식 구동(MEMS) 기술을 이용하여 제작되는 광스위치 소자에서 반사판의 두께에 따라 입,출력단 사이에서 발생하는 옵셋을 보정 가능토록 하는 기술에 관한 것이다.
본 발명은 반사판에서 반사된 입사광을 다시 반사판으로 반사시키는 측벽과, 입력단으로부터 입사되는 입사광을 상기 측벽의 반사면에 반사시켜 광손실을 최소화할 수 있는 거리의 중앙부에 위치하여 출력단으로의 광로를 변화시키는 반사판 및 상기 반사판과 결합되어 임의의 위치로 이동할 수 있는 구동력을 발생시키는 구동소자를 포함하여 이루어진 것을 특징으로 하는 옵셋 보정이 가능한 광스위치 소자가 제시된다.
따라서, 본 발명은 광스위치 소자의 옵셋 보정이 가능하도록 하여 입사광의 반사에 따른 광 손실을 최소화할 수 있으므로 이를 대용량이면서 안정적으로 동작할 수 있는 광스위치 소자에 적용시킬 수 있다.