公开(公告)号：KR20100136940A

公开(公告)日：2010-12-29

申请号：KR20100058143

申请日：2010-06-18

Applicant: ASML NETHERLANDS BV

Inventor： VAN BUEL HENRICUS WILHELMUS MARIA ,  BROEKHUIJSE JEROEN THOMAS ,  PROSYENTSOV VITALIY ,  VAN DER GRAAF SANDRA ,  DZIOMKINA NINA VLADIMIROVNA

IPC: H01L21/027

CPC classification number: G03F7/7085 ,  G03F7/70341 ,  G03F7/70616 ,  H01L21/0274

Abstract: PURPOSE: A sensor for an immersion system, a table, and a lithography apparatus are provided to obtain resistance against immersion, exposed radiation, and quantum. CONSTITUTION: A sensing device(SD) senses the property of a radiation beam. A transparent layer(TL) covers a sensor. The transparent layer allows radiation beams to pass. An opaque patterning layer is positioned between the transparent layer and the sensing device.

Abstract translation: 目的：提供一种用于浸没系统，桌子和光刻设备的传感器，以获得抵抗浸没，暴露的辐射和量子的抵抗能力。 构成：感测装置（SD）感测辐射束的性质。 透明层（TL）覆盖传感器。 透明层允许辐射束通过。 不透明图案层位于透明层和感测装置之间。

公开(公告)号：JP2011003898A

公开(公告)日：2011-01-06

申请号：JP2010135725

申请日：2010-06-15

Applicant: Asml Netherlands Bv ,  エーエスエムエル ネザーランズ ビー.ブイ.

Inventor： VAN BUEL HENRICUS WILHELMUS MARIA ,  BROEKHUIJSE JEROEN THOMAS ,  PROSYENTSOV VITALIY ,  VAN DER GRAAF SANDRA ,  DZIOMKINA NINA VLADIMIROVNA

IPC: H01L21/027

CPC classification number: G03F7/7085 ,  G03F7/70341 ,  G03F7/70616

Abstract: PROBLEM TO BE SOLVED: To provide a sensor effective for a liquid immersion apparatus.SOLUTION: This sensor includes a detector, a transparent layer and an opaque pattern layer. The detector is configured to sense a characteristic of a radiation beam. The transparent layer is configured to allow the passage of the radiation beam therethrough. The transparent layer covers the detector. The opaque pattern layer is configured to impart a pattern to the radiation beam. The patterning layer is provided with an opening, and a filling material is arranged in the opening. The filling material is transparent to the radiation beam and has a refractive index identical to that of the transparent layer.

Abstract translation: 要解决的问题：提供对液浸设备有效的传感器。解决方案：该传感器包括检测器，透明层和不透明图案层。 检测器被配置为感测辐射束的特性。 透明层构造成允许辐射束通过其中。 透明层覆盖检测器。 不透明图案层被配置为赋予辐射束图案。 图形层设置有开口，并且开口中布置有填充材料。 填充材料对辐射束是透明的，并且具有与透明层相同的折射率。