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    Sensor for liquid immersion lithographic apparatus
    2.
    发明专利
    Sensor for liquid immersion lithographic apparatus 审中-公开
    传感器用于液体沉降光刻设备

    公开(公告)号：JP2011003898A

    公开(公告)日：2011-01-06

    申请号：JP2010135725

    申请日：2010-06-15

    Applicant: Asml Netherlands Bv ,  エーエスエムエル ネザーランズ ビー.ブイ.

    Inventor： VAN BUEL HENRICUS WILHELMUS MARIA ,  BROEKHUIJSE JEROEN THOMAS ,  PROSYENTSOV VITALIY ,  VAN DER GRAAF SANDRA ,  DZIOMKINA NINA VLADIMIROVNA

    IPC: H01L21/027

    CPC classification number: G03F7/7085 ,  G03F7/70341 ,  G03F7/70616

    Abstract: PROBLEM TO BE SOLVED: To provide a sensor effective for a liquid immersion apparatus.SOLUTION: This sensor includes a detector, a transparent layer and an opaque pattern layer. The detector is configured to sense a characteristic of a radiation beam. The transparent layer is configured to allow the passage of the radiation beam therethrough. The transparent layer covers the detector. The opaque pattern layer is configured to impart a pattern to the radiation beam. The patterning layer is provided with an opening, and a filling material is arranged in the opening. The filling material is transparent to the radiation beam and has a refractive index identical to that of the transparent layer.

    Abstract translation: 要解决的问题：提供对液浸设备有效的传感器。解决方案：该传感器包括检测器，透明层和不透明图案层。 检测器被配置为感测辐射束的特性。 透明层构造成允许辐射束通过其中。 透明层覆盖检测器。 不透明图案层被配置为赋予辐射束图案。 图形层设置有开口，并且开口中布置有填充材料。 填充材料对辐射束是透明的，并且具有与透明层相同的折射率。

    Lithographic apparatus, substrate table and device manufacturing method
    3.
    发明专利
    Lithographic apparatus, substrate table and device manufacturing method 审中-公开
    光刻设备，基板和器件制造方法

    公开(公告)号：JP2013046048A

    公开(公告)日：2013-03-04

    申请号：JP2011270171

    申请日：2011-12-09

    Applicant: Asml Netherlands Bv ,  エーエスエムエル ネザーランズ ビー.ブイ.

    Inventor： PROSYENTSOV VITALIY ,  JOHANNES MARIA VAN BENTEN

    IPC: H01L21/027 ,  G03F7/20

    CPC classification number: G03F7/70575 ,  G03F7/7085 ,  G03F9/7015 ,  G03F9/7088

    Abstract: PROBLEM TO BE SOLVED: To provide a substrate table having a sensor which resolves one or more existing difficulties.SOLUTION: A substrate table comprises a sensor which includes a material block provided with a material layer opaque to radiation. The material layer has at least one window configured to permit transmission of radiation. The sensor comprises a wavelength conversion material located at the window, and a waveguide located so as to receive radiation emitted from the wavelength conversion material. The waveguide is embedded in the material block, and configured to direct the radiation emitted from the wavelength conversion material toward a detector through the material block.

    Abstract translation: 要解决的问题：提供一种具有解决一个或多个现有困难的传感器的基板台。 解决方案：衬底台包括传感器，其包括具有不透辐射的材料层的材料块。 材料层具有被配置为允许辐射传递的至少一个窗口。 传感器包括位于窗口处的波长转换材料和位于以便接收从波长转换材料发出的辐射的波导。 波导嵌入在材料块中，并且被配置为将从波长转换材料发射的辐射引向通过材料块的检测器。 版权所有（C）2013，JPO＆INPIT

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