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公开(公告)号：EP3095127A4
公开(公告)日：2017-10-18
申请号：EP15736925
申请日：2015-01-16
Applicant: BREWER SCIENCE INC
Inventor： XU KUI , HOCKEY MARY ANN , CALDERAS ERIC
IPC: H01L21/027
CPC classification number: C09D153/00 , C08F293/005 , C08F2438/03 , G03F7/0002 , Y10T428/24802 , Y10T428/3154
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