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1.发明公开HIGHLY ETCH-RESISTANT POLYMER BLOCK FOR USE IN BLOCK COPOLYMERS FOR DIRECTED SELF-ASSEMBLY 审中-公开耐强腐蚀聚合物块以嵌段共聚物中为寻找自组装
公开(公告)号：EP2981985A4
公开(公告)日：2016-11-02
申请号：EP14779168
申请日：2014-04-01
Applicant: BREWER SCIENCE INC
Inventor： XU KUI , HOCKEY MARY ANN , GUERRERO DOUGLAS
IPC: H01L21/027 , C08L33/12
CPC classification number: H01L21/0331 , B81C1/00031 , B81C2201/0149 , C08F212/08 , C08F212/32 , C08F293/005 , C08F2438/03 , C08L33/12 , C09D125/08 , C09D125/14 , C09D125/16 , C09D153/00 , G03F7/0002 , H01L21/0337 , H01L21/31133 , H01L21/31138
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公开(公告)号：EP3095127A4
公开(公告)日：2017-10-18
申请号：EP15736925
申请日：2015-01-16
Applicant: BREWER SCIENCE INC
Inventor： XU KUI , HOCKEY MARY ANN , CALDERAS ERIC
IPC: H01L21/027
CPC classification number: C09D153/00 , C08F293/005 , C08F2438/03 , G03F7/0002 , Y10T428/24802 , Y10T428/3154
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