公开(公告)号：EP2981985A4

公开(公告)日：2016-11-02

申请号：EP14779168

申请日：2014-04-01

Applicant: BREWER SCIENCE INC

Inventor： XU KUI ,  HOCKEY MARY ANN ,  GUERRERO DOUGLAS

IPC: H01L21/027 ,  C08L33/12

CPC classification number: H01L21/0331 ,  B81C1/00031 ,  B81C2201/0149 ,  C08F212/08 ,  C08F212/32 ,  C08F293/005 ,  C08F2438/03 ,  C08L33/12 ,  C09D125/08 ,  C09D125/14 ,  C09D125/16 ,  C09D153/00 ,  G03F7/0002 ,  H01L21/0337 ,  H01L21/31133 ,  H01L21/31138

公开(公告)号：EP3095127A4

公开(公告)日：2017-10-18

申请号：EP15736925

申请日：2015-01-16

Applicant: BREWER SCIENCE INC

Inventor： XU KUI ,  HOCKEY MARY ANN ,  CALDERAS ERIC

IPC: H01L21/027

CPC classification number: C09D153/00 ,  C08F293/005 ,  C08F2438/03 ,  G03F7/0002 ,  Y10T428/24802 ,  Y10T428/3154

公开(公告)号：EP2839341A4

公开(公告)日：2015-11-25

申请号：EP13778282

申请日：2013-04-15

Applicant: BREWER SCIENCE INC

Inventor： WANG YUBAO ,  HOCKEY MARY ANN ,  GUERRERO DOUGLAS J ,  KRISHNAMURTHY VANDANA ,  COX ROBERT C

IPC: H01L21/033 ,  B81C1/00 ,  G03F7/00 ,  H01L21/311

CPC classification number: B81C1/0038 ,  B81B1/00 ,  B81C1/00031 ,  B81C2201/0149 ,  G03F7/0002 ,  G03F7/26 ,  H01L21/02126 ,  H01L21/02216 ,  H01L21/02282 ,  H01L21/0332 ,  H01L21/0337 ,  H01L21/31144 ,  Y10T428/24612 ,  Y10T428/24802

Abstract: Compositions for directed self-assembly patterning techniques are provided which avoid the need for separate anti-reflective coatings and brush neutral layers in the process. Methods for directed self-assembly are also provided in which a self-assembling material, such as a directed self-assembly block copolymer, can be applied directly to the silicon hardmask neutral layer and then self-assembled to form the desired pattern. Directed self-assembly patterned structures are also disclosed herein.